Volume 5 Issue 4
Aug.  2012
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ZHAO Yang, GONG Yan. Computer aided alignment of small scale projected objective[J]. Chinese Optics, 2012, 5(4): 394-400. doi: 10.3788/CO.20120504.0394
Citation: ZHAO Yang, GONG Yan. Computer aided alignment of small scale projected objective[J]. Chinese Optics, 2012, 5(4): 394-400. doi: 10.3788/CO.20120504.0394

Computer aided alignment of small scale projected objective

doi: 10.3788/CO.20120504.0394
  • Received Date: 21 Mar 2012
  • Rev Recd Date: 23 Jun 2012
  • Publish Date: 10 Aug 2012
  • Due to the large numbers of lenses, it is impossible for the complex refractive system to use a compensator only to compensate the corresponding misalignment. Based on the aided alignment technology, this paper proposed a method to reduce the range of compensator selection by building a sensitivity matrix and finding the internal relations between decenter disalignments and tip/tilt ones. Then, a method by using only four compensators to compensate the whole optical system was proposed by analyzing the sensitivities of misalignments, and the feasibility of the selected compensators was proved by a simulation. After finishing assembling of the whole optical system, the tested wave front errors were induced into the sensitivity matrix in the form of 36 items of Fringe Zernike polynomials to calculate the values and the moving directions of compensators driven by precision actuators. The test results show that the wave front errors(RMS) have reduced to 25.993 nm from 50.864 nm, which is better than the qualifications and proves that the selected four compensators are right and effective.


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