Volume 5 Issue 3
Jun.  2012
Turn off MathJax
Article Contents
YANG Dao-qi, FU Xiu-hua, GENG Si-yu, YANG Yong-liang, PAN Yong-gang. Design and fabrication of 0.6-1.55 μm visible/near infrared ultra-broad band antireflection coatings[J]. Chinese Optics, 2012, 5(3): 270-276. doi: 10.3788/CO.20120503.0270
Citation: YANG Dao-qi, FU Xiu-hua, GENG Si-yu, YANG Yong-liang, PAN Yong-gang. Design and fabrication of 0.6-1.55 μm visible/near infrared ultra-broad band antireflection coatings[J]. Chinese Optics, 2012, 5(3): 270-276. doi: 10.3788/CO.20120503.0270

Design and fabrication of 0.6-1.55 μm visible/near infrared ultra-broad band antireflection coatings

doi: 10.3788/CO.20120503.0270
  • Received Date: 21 Jan 2012
  • Rev Recd Date: 23 Mar 2012
  • Publish Date: 10 Jun 2012
  • As for the operating requirements of spectrometer detector windows operating from visible to the infrared spectrum, the TiO2, M1 and SiO2 were chosen as coating materials with different refractive indexes and were designed into film stacks by various schemes. By using electron beam evaporation with ion beam assist deposition, the visible/near infrared ultra-broad band antireflective coatings with excellent optical properties, good repetition and firmness were prepared by parameter adjustment. The average transmittances of these coatings are better than 99% at (650?10) nm, 900-1 100 nm and (1 470?10) nm, and better than 97% in 620-1 550 nm as a whole. It meets the actual requirements of the spectrometer detector windows well.

     

  • loading
  • [1] 李晓丽,唐月明,何勇,等. 基于可见/近红外光谱的水稻品种快速鉴别研究[J]. 光谱学与光谱分析 ,2008,28(3): 578-581. LI X L,TANG Y M,HE Y,et al.. Discrimination of varieties of paddy based on Vis/NIR spectroscopy combined with chemometrics[J]. Spectrosc. Spect. Anal.,2008,28(3):578-581.(in Chinese) [2] 李大琪,刘定权,张凤山. 6.4~15 μm宽带增透膜的设计与制作[J]. 红外与毫米波学报 ,2006,25(2):135~137. LI D Q,LIU D Q,ZHNAG F SH. Design and fabrication of 6.4~15 μm broadband anti-reflection coatings[J]. J. Infrared Millim. W.,2006,25(2):135-137.(in Chinese) [3] 朱昌,刘佳,GOLSOV D A,等. 氧分压对TiO2薄膜光学性能的影响[J]. 西安工业大学学报 ,2008,28(6):511-515. ZHU CH,LIU J,GOLSOV D A,et al.. Influence of oxygen pressure on the optical properties of TiO2 films deposited with IBS ion-assisted technique[J]. J. xian Technological University,2008,28(6):511-515.(in Chinese) [4] 赵缨慰,付秀华,李珊,等 .多功能抗激光损伤高反射膜[J]. 中国光学与应用光学 ,2010,3(3): 274-278. ZHAO Y W,FU X H,LI SH,et al.. Anti-laser induced damage high reflectance film with multifunction[J]. Chinese J. Opt. Appl. Optics,2010,3(3):274-278.(in Chinese) [5] 黄光伟,田维坚,卜江萍. 超宽带增透膜新的设计法[J]. 光子学报 ,2007,36(9):1694-1696. HUANG G W,TIAN W J,BU J P. New design of super wide bandwidth anti-reflection film[J]. Acta Photonica Sinica,2007,36(9):1694-1696.(in chinese) [6] GOTZELMANN Z R,MATL K,CUSHING D. Temperature-stable bandpass filters deposited with plasma ion-assisted deposition[J]. Appl. Opt. Exp.,1996,35(28):5609-5612. [7] 喻志农,相龙锋,薛唯,等. 离子辅助反应蒸发技术室温制备ITO薄膜[J]. 北京理工大学学报 ,2007,27(10):924-927. YU ZH N,xianG L F,XUE W,et al.. Preparation of ITO films deposited at room temperature by ion beam-assisted reactive evaporation[J]. Journal of Beijing Institute of Technology,2007,27(10):924-927.(in Chinese) [8] 冯丽萍. 蓝宝石衬底上中波红外增透保护膜系的设计、制备及性能 .西安:西北工业大学,2006. FENG L P. Design, preparation and properties of middle-wave infrared antireflective and protective films on sapphire substrates . xian:Northwestern Polytechnical University,2006. [9] 顾培夫,陈海星,艾曼灵,等 .TiO2膜消光系数的确定及制备参量的影响[J]. 光学学报 ,2005,25(7):1005-1008. GU P F,CHEN H X,AI M L,et al.. Determination of the extinction coefficient of TiO2 and effect of preparation parameters[J]. Acta Opt. Sinica,2005,25(7):1005-1008.(in Chinese) [10] 唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M]. 杭州:浙江大学出版社,2006. TANG J F,GU P F,LIU X,et al.. Modern Optical Thin Film Technology[M]. Hangzhou:Zhejiang University Press,2006.(in Chinese) [11] 王晓强,甄聪棉,李明亚. TiO2/SiO2复合薄膜的结构表征及光学特性研究[J]. 稀有金属材料与工程 ,2008,37(增1):545-547. WANG X Q,ZHEN C M,LI M Y. Structure and optical properties of TiO2/SiO2 composite films[J]. Rare Metal Materials and En.,2008,37(s1):545-547.(in Chinese)
  • 加载中

Catalog

    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索
    Article views(2383) PDF downloads(879) Cited by()
    Proportional views

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return