计算全息法标定单光楔补偿检测系统误差

蔡志华; 王孝坤; 胡海翔; 程强; 王若秋; 张海东

doi:10.37188/CO.EN.2021-0004

Volume 15 Issue 1

Jan. 2022

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Article Contents

Chinese Optics > 2022 > 15(1): 90-100.

CAI Zhi-hua, WANG Xiao-kun, HU Hai-xiang, CHENG Qiang, WANG Ruo-qiu, ZHANG Hai-dong. Calibration of single optical wedge compensation test system error by computer generation hologram[J]. Chinese Optics, 2022, 15(1): 90-100. doi: 10.37188/CO.EN.2021-0004

Citation:

CAI Zhi-hua, WANG Xiao-kun, HU Hai-xiang, CHENG Qiang, WANG Ruo-qiu, ZHANG Hai-dong. Calibration of single optical wedge compensation test system error by computer generation hologram[J]. Chinese Optics, 2022, 15(1): 90-100. doi: 10.37188/CO.EN.2021-0004

Citation:

CAI Zhi-hua, WANG Xiao-kun, HU Hai-xiang, CHENG Qiang, WANG Ruo-qiu, ZHANG Hai-dong. Calibration of single optical wedge compensation test system error by computer generation hologram[J]. Chinese Optics, 2022, 15(1): 90-100. doi: 10.37188/CO.EN.2021-0004

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Calibration of single optical wedge compensation test system error by computer generation hologram

doi: 10.37188/CO.EN.2021-0004

CAI Zhi-hua^{1, 2
,},
WANG Xiao-kun^{1, 2
,
,},
HU Hai-xiang^{1, 2
,
,},
CHENG Qiang^{1, 2},
WANG Ruo-qiu^{1, 2},
ZHANG Hai-dong^{1, 2}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by Key Research Program of Frontier Sciences, Chinese Academy of Sciences (No. QYZDJ-SSW-JSC038);Jilin Province Science and Technology Development Plan Project Mission Statement (No.20200401065GX); Youth Innovation Promotion Association, Chinese Academy of Sciences (No.2019221);National Natural Science Foundation of China (No.61805243, No.61975201, No.12003034, No.12003035, No. 62127901)

More Information

Author Bio:
Cai Zhi-hua (1991—), male, from Dezhou, Shandong, PhD candidate, obtained a bachelor degree from Shandong Normal University in 2014, mainly engaged in optical design and testing technology research. E-mail: pe_dzcaizhihua@126.com

Wang Xiao-kun (1980—), male, from Danyang, Jiangsu, professor, doctoral supervisor, obtained a bachelor degree from Jiangsu Normal University in 2003, and a doctorate degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2008, mainly engaged in optical manufacturing and testing technology. E-mail: jimwxk@sohu.com

Hu Haixiang (1990—), associated researcher, obtained a bachelor degree from University of Science and Technology of China in 2012, and a doctorate degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2017, mainly interested in optical fabrication and testing. E-mail: hhx@ciomp.ac.cn
Corresponding author: jimwxk@sohu.com; hhx@ciomp.ac.cn
Received Date: 02 Mar 2021
Rev Recd Date: 18 Mar 2021

Available Online: 18 Jun 2021

Publish Date: 19 Jan 2022

Abstract

Abstract

As a testing method for large convex aspheric surface, the single optical wedge compensation test has good applicability, robustness and flexibility. However, various errors are coupled with one another during the test process and these errors are difficult to decouple. This affects the accuracy and reliability of the tests. To address this, a method is developed to calibrate the system error of single optical wedge test paths using a Computer Generation Hologram (CGH). We first analysed the source of system error in the optical path of a single optical wedge compensation test as well as the feasibility of using CGH for the calibration of an optical wedge compensation test system. In combination with engineering examples, a CGH was designed for optical wedge compensators with a diameter of 150 mm. Based on the analysis results, the calibration accuracy of the CGH was 1.98 nm RMS, and after calibration the test accuracy of single wedge compensation was 3.43 nm RMS, thereby meeting the high-precision test requirements of large convex aspheric mirrors. This shows that CGH can accurately calibrate the pose of single optical wedge compensators and the test system errors of optical paths. Thus we address the problems affecting error decoupling in test optical paths, and improve the accuracy and reliability of the single optical wedge compensation method. Meanwhile, using CGH calibration, the system errors of the test optical paths, Tap#2 and Tap#3, were 0.023 and 0.011 λ RMS, respectively.
- computer generation hologram,
- optical test,
- diffraction,
- optical wedge

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References(20)

References

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