| Citation: | Wang Hao-xing, LIU Jia, WANG Hai-yang, WANG Jun, LI Yuan-hao, YIN Jian-xiong, WAN Shun, DAI Yun-teng, JIA Ping-gang. Metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation[J]. Chinese Optics. doi: 10.37188/CO.EN-2025-0021
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A metal-sensitive diaphragm fiber optic pressure sensor with temperature compensation is proposed to address pressure monitoring in high-temperature environments, such as engine fuel systems, oil and gas wells, and aviation hydraulic systems. The sensor combines a metal-sensitive diaphragm and a sapphire wafer to form a temperature-pressure dual Fabry-Perot (FP) interference cavity. A cross-correlation signal demodulation algorithm and a temperature decoupling method are utilized to reduce the influence of temperature crosstalk on pressure measurement. Experimental results show that the maximum nonlinear error of the accuracy of the sensor pressure measurement is 0.75% FS and 0.99% FS at room temperature and 300 °C, respectively, in a pressure range of 0−10 MPa and 0−1.5 MPa. The sensor’s pressure measurement accuracy is 1.7% full scale (FS) when using the temperature decoupling method. The sensor exhibits good static pressure characteristics, stability, and reliability, providing an effective solution for high-temperature pressure monitoring applications.
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