Volume 17 Issue 3
May  2024
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LI Ji, ZHANG Xia, FENG Yi, LIAO Chang, ZHANG Jie, YIN Yong-ming, MENG Hong. Adjusting the compactness and hydrophobicity of color filters to decrease gas release during TFT-LCD fabrication[J]. Chinese Optics, 2024, 17(3): 704-713. doi: 10.37188/CO.EN-2023-0029
Citation: LI Ji, ZHANG Xia, FENG Yi, LIAO Chang, ZHANG Jie, YIN Yong-ming, MENG Hong. Adjusting the compactness and hydrophobicity of color filters to decrease gas release during TFT-LCD fabrication[J]. Chinese Optics, 2024, 17(3): 704-713. doi: 10.37188/CO.EN-2023-0029

Adjusting the compactness and hydrophobicity of color filters to decrease gas release during TFT-LCD fabrication

doi: 10.37188/CO.EN-2023-0029
Funds:  Supported by National Natural Science Foundation of China (No. 62205058); Guangdong Basic and Applied Basic Research Foundation (No. 2021A1515110085); Shenzhen Fundamental Research Program (No. JSGG20220831103402005)
More Information
  • Author Bio:

    LI Ji (1988—), male, born in Huanggang, Hubei province. In 2013, he received his master's degree from South China University of Technology. Currently, he is a PhD candidate at Peking University. He is mainly engaged in research and development of display materials. E-mail: liji02@stu.pku.edu.cn

    YIN Yong-ming (1989—), male, born in Chenzhou, Hunan province. He obtained his degrees for Bachelor and Master from Jilin University, and then undertook his Ph.D. studies at Peking University from 2016 to 2020. Currently, he serves as an associate professor at Shenzhen MSU-BIT University. His research interests are in optoelectronics materials and devices for display applications. E-mail: yinyongming@smbu.edu.cn

    MENG Hong (1966—), male, born in Huayin city, Shanxi province. Chair Professor, School of Advanced Materials, Shenzhen Graduate School, Peking University. He received his Ph. D. from the University of California, Los Angeles in 2002. His research interests are in organic optoelectronics materials and devices. E-mail: menghong@pku.edu.cn

  • Corresponding author: yinyongming@smbu.edu.cnmenghong@pku.edu.cn
  • Received Date: 15 Nov 2023
  • Rev Recd Date: 04 Dec 2023
  • Accepted Date: 14 Dec 2023
  • Available Online: 31 Jan 2024
  • The TFT-LCD industry is moving towards high efficiency and low costs. During the manufacturing process, it has been found that various photoresists require different vacuum drying times. To reduce manufacturing time and increase panel yields, clarifying the factors that can influence and reduce the vacuum time is necessary. This paper explored the relationship between pumping time and the properties of photoresist materials. It finds that the thermal stability of the photoresist has a negligible relationship with the pumping time. The compactness and hydrophobicity of the photoresist correlated strongly with the vacuum drying time. High compactness and high hydrophobicity can effectively prevent water vapor intrusion and storage in the photoresist during fabrication and consequently reduce pumping times. Overall, this work could guide the future development of new photoresists for the TFT-LCD industry.


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