高波前拟合精度的紧凑型音圈变形镜

胡立发; 姜律; 胡启立; 徐星宇; 黄杨; 吴晶晶; 俞琳

doi:10.37188/CO.EN-2023-0001

Volume 16 Issue 6

Nov. 2023

Turn off MathJax

Article Contents

Chinese Optics > 2023 > 16(6): 1463-1474.

HU Li-fa, JIANG Lv, HU Qi-li, XU Xing-yu, HUANG Yang, WU Jing-jing, YU Lin. Compact voice coil deformable mirror with high wavefront fitting precision[J]. Chinese Optics, 2023, 16(6): 1463-1474. doi: 10.37188/CO.EN-2023-0001

Citation:

HU Li-fa, JIANG Lv, HU Qi-li, XU Xing-yu, HUANG Yang, WU Jing-jing, YU Lin. Compact voice coil deformable mirror with high wavefront fitting precision[J]. Chinese Optics, 2023, 16(6): 1463-1474. doi: 10.37188/CO.EN-2023-0001

Citation:

PDF( 4985 KB)

Compact voice coil deformable mirror with high wavefront fitting precision

doi: 10.37188/CO.EN-2023-0001

HU Li-fa^{1, 3
,},
JIANG Lv^{1, 3},
HU Qi-li²,
XU Xing-yu^{1, 3},
HUANG Yang^{1, 3
,
,},
WU Jing-jing^{1, 3},
YU Lin^{1, 3}

1.
School of Science, Jiangnan University, Wuxi 214122, China
2.
Key Laboratory of Electro-Optical Countermeasures Test & Evaluation Technology, Luoyang 471003, China
3.
Jiangsu Provincial Research Center of Light Industrial Opto-electronic Engineering and Technology, Wuxi 214122, China

Funds: Supported by National Natural Science Foundation of China (No. 61475152); Fund for Key Laboratory of Electro-Optical Countermeasures Test & Evaluation Technology (No. GKCP2021001)

More Information

Author Bio:
HU Li-fa (1974—), male, born in Wuhan, Hubei Province, Ph.D., researcher and doctoral supervisor, obtained a doctorate degree from Northeastern University in 2003, is mainly engaged in liquid crystal adaptive optics research. E-mail：hulifa@jiangnan.edu.cn

HUANG Yang (1988—), male, born in Nantong, Jiangsu Province, Ph.D., associate professor and master supervisor, obtained a doctorate degree from Soochow University in 2016, is mainly engaged in adaptive optics technology and application research. E-mail：yanghuang@jiangnan.edu.cn
Corresponding author: yanghuang@jiangnan.edu.cn
Received Date: 10 Jan 2023
Rev Recd Date: 09 Mar 2023

Available Online: 10 May 2023

Abstract

Abstract

To meet the requirements of wavefront distortion correction for miniaturized adaptive optics systems, a Deformable Mirror (DM) using micro voice coil actuators was designed based on systematic theoretical analysis. The structural parameters of the micro voice coil actuator were optimized by electromagnetic theory and the finite element method. The DM was optimized with respect to thermal deformation, resonance frequency, coupling coefficient and other parameters. Finally, wavefront fitting and residual calculation were completed according to the influence function. The optimized 69-element Voice Coil Deformable Mirror (VCDM) has a large phase stroke, good thermal stability, and a large first resonance of 2220 Hz. The RMS of the fitting residuals of the VCDM for the first 35 Zernike modes with a PV value of 1 μm are all below 30 nm. For complex random aberrations, the compact VCDM can reduce the wavefront RMS to less than 10%. Compared with a traditional VCDMs, the results of our compact VCDM indicate that it has a higher wavefront fitting precision. The compact VCDM with high performance and low cost has good potential applications in human retinal or airborne imaging systems.
- adaptive optics,
- deformable mirror,
- voice coil actuator,
- multiparameter analysis

FullText(HTML)

References(27)

References

[1]	HU L F, LIU CH, SHEN W, et al. Advancement of adaptive optics in astronomical observation[J]. Scientia Sinica Physica, Mechanica & Astronomica, 2017, 47(8): 084202. (in Chinese).
[2]	YUAN D B, XU L, ZHANG W B, et al. Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability[J]. Chinese Optics, 2021, 14(6): 1362-1367. (in Chinese). doi: 10.37188/CO.2021-0103
[3]	WU ZH ZH, ZHANG T Y, MBEMBA D, et al. Wavefront sensorless aberration correction with magnetic fluid deformable mirror for laser focus control in optical tweezer system[J]. IEEE Transactions on Magnetics, 2021, 57(1): 1-6.
[4]	KAMEL A, KOCER S, MUKHANGALIYEVA L, et al. Resonant adaptive MEMS mirror[J]. Actuators, 2022, 11(8): 224. doi: 10.3390/act11080224
[5]	LIU X Y, CAO SH, HU D T, et al. Design of voice-coil deformable mirror and its mechanical characteristics[J]. Chinese Journal of Liquid Crystals and Displays, 2020, 35(8): 801-807. (in Chinese). doi: 10.37188/YJYXS20203508.0801
[6]	ANDERSEN T, GARPINGER O, OWNER-PETESEN M, et al. Novel concept for large deformable mirrors[J]. Optical Engineering, 2006, 45(7): 073001. doi: 10.1117/1.2227014
[7]	BRUSA G, RICCARDI A, SALINARI P, et al. MMT adaptive secondary: performance evaluation and field testing[J]. Proceedings of SPIE, 2003, 4839: 691-702. doi: 10.1117/12.459786
[8]	BRIGUGLIO R, QUIRÓS-PACHECO F, MALES J R, et al. Optical calibration and performance of the adaptive secondary mirror at the Magellan telescope[J]. Scientific Reports, 2018, 8(1): 10835. doi: 10.1038/s41598-018-29171-6
[9]	WRIGHT T, SPARKS H, PATERSON C, et al. Video-rate remote refocusing through continuous oscillation of a membrane deformable mirror[J]. Journal of Physics:Photonics, 2021, 3(4): 045004. doi: 10.1088/2515-7647/ac29a2
[10]	MORGAN R E, DOUGLAS E S, ALLAN G W, et al. MEMS deformable mirrors for space-based high-contrast imaging[J]. Micromachines, 2019, 10(6): 366. doi: 10.3390/mi10060366
[11]	FERNANDEZ E J, VABRE L, HERMANN B, et al. Adaptive optics with a magnetic deformable mirror: applications in the human eye[J]. Optics Express, 2006, 14(20): 8900-8917. doi: 10.1364/OE.14.008900
[12]	ZAMKOTSIAN F, LIOTARD A, LANZONI P, et al. Electrostatic micro-deformable mirror for adaptive optics[J]. Proceedings of SPIE, 2006, 6272: 627222. doi: 10.1117/12.671632
[13]	LIU L, GUO J, ZHAO SH, et al. Application of stochastic parallel gradient descent algorithm in laser beam shaping[J]. Chinese Optics, 2014, 7(2): 260-266. (in Chinese).
[14]	NOLL R J. Zernike polynomials and atmospheric turbulence[J]. Journal of the Optical Society of America, 1976, 66(3): 207-211. doi: 10.1364/JOSA.66.000207
[15]	HARDY J W, THOMPSON L. Adaptive optics for astronomical telescopes[J]. Physics Today, 2000, 53(4): 69.
[16]	HAMELINCK R F M M. Adaptive deformable mirror: based on electromagnetic actuators[D]. Eindhoven: Technische Universiteit Eindhoven, 2010: 23-25.
[17]	DOBLE N, MILLER D T, YOON G, et al. Requirements for discrete actuator and segmented wavefront correctors for aberration compensation in two large populations of human eyes[J]. Applied Optics, 2007, 46(20): 4501-4514. doi: 10.1364/AO.46.004501
[18]	ZHAO J L, XIAO F, KANG J, et al. Statistical analysis of ocular monochromatic aberrations in Chinese population for adaptive optics ophthalmoscope design[J]. Journal of Innovative Optical Health Sciences, 2017, 10(1): 1650038. doi: 10.1142/S1793545816500383
[19]	JAROSZ J, MECÊ P, CONAN J M, et al. High temporal resolution aberrometry in a 50-eye population and implications for adaptive optics error budget[J]. Biomedical Optics Express, 2017, 8(4): 2088-2105. doi: 10.1364/BOE.8.002088
[20]	WANG CH CH, LU SH ZH, ZHANG C Y, et al. Design and dynamic modeling of a 3-RPS compliant parallel robot driven by voice coil actuators[J]. Micromachines, 2021, 12(12): 1442. doi: 10.3390/mi12121442
[21]	ZHANG ZH G, HU Q L, MA W CH, et al. Design and performance research of high efficiency variable reluctance voice coil actuator[J]. Chinese Journal of Liquid Crystals and Displays, 2022, 37(1): 21-28. (in Chinese). doi: 10.37188/CJLCD.2021-0272
[22]	CUGAT O, BASROUR S, DIVOUX C, et al. Deformable magnetic mirror for adaptive optics: technological aspects[J]. Sensors and Actuators A:Physical, 2001, 89(1-2): 1-9. doi: 10.1016/S0924-4247(00)00550-1
[23]	BANERJEE K, RAJAEIPOUR P, ZAPPE H, et al. A 37-actuator polyimide deformable mirror with electrostatic actuation for adaptive optics microscopy[J]. Journal of Micromechanics and Microengineering, 2019, 29(8): 085005. doi: 10.1088/1361-6439/ab2370
[24]	YU E, JOSHI Y K. Natural convection air cooling of electronic components in partially open compact horizontal enclosures[J]. IEEE Transactions on Components and Packaging Technologies, 2000, 23(1): 14-22. doi: 10.1109/6144.833037
[25]	HUANG L H, RAO CH H, JIANG W H. Modified Gaussian influence function of deformable mirror actuators[J]. Optics Express, 2008, 16(1): 108-114. doi: 10.1364/OE.16.000108
[26]	AHN K, KIHM H. Moment actuator for correcting low-order aberrations of deformable mirrors[J]. Optics and Lasers in Engineering, 2020, 126: 105864. doi: 10.1016/j.optlaseng.2019.105864
[27]	张志高. 模块化音圈变形镜的结构设计与性能研究[D]. 无锡: 江南大学, 2022. ZHANG ZH G. Structure design and performance research of modular voice coil deformable mirror[D]. Wuxi: Jiangnan University, 2022. (in Chinese).