| Citation: | WANG Yu-pei, ZHANG Yu-hang, LUO Xiao-yue, QIAN Chen-hao, CHENG Yang, ZHAO Wu, WEI Zhi-xiang, HAN Di-yi, SUN Fang-yuan, WANG Jun, ZHOU Da-yong. Double active region structure 4.7 μm medium wave infrared quantum cascade laser[J]. Chinese Optics. doi: 10.37188/CO.2023-0239
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In the article, we report a 4.7 μm mid wave infrared quantum cascade laser based on double active regions, with a ridge width of 9.5 μm, It can achieve continuous single transverse mode operation at room temperature. By inserting 0.8 μm InP, the original single active region is transformed into a double active region structure, it can significantly reduce the peak temperature of the device's active region and suppress the generation of higher-order transverse modes. At a temperature of 288 K, the device with a double active region structure with a cavity length of 5 mm has a threshold current density of 1.14 kA/cm2, the continuous output power of 0.706 W, the fast axis divergence angle of 27.3°, and the slow axis divergence angle of 18.1°. Compared with conventional devices with a single active region structure, the devices with a double active region structure have no degradation in their maximum optical output power, and the beam quality in the slow axis direction of the device has been significantly improved. This work provides another solution for improving the slow axis beam quality of high-power medium wave quantum cascade lasers.
| [1] |
FAIST J, CAPASSO F, SIVCO D L, et al. Quantum cascade laser[J]. Science, 1994, 264(5158): 553-556. doi: 10.1126/science.264.5158.553
|
| [2] |
赵越, 张锦川, 刘传威, 等. 中远红外量子级联激光器研究进展(特邀)[J]. 红外与激光工程,2018,47(10):1003001. doi: 10.3788/IRLA201847.1003001
ZHAO Y, ZHANG J CH, LIU CH W, et al. Progress in mid-and far-infrared quantum cascade laser (invited)[J]. Infrared and Laser Engineering, 2018, 47(10): 1003001. (in Chinese). doi: 10.3788/IRLA201847.1003001
|
| [3] |
DELY H, BONAZZI T, SPITZ O, et al. 10 Gbit s−1 free space data transmission at 9 µm wavelength with unipolar quantum optoelectronics[J]. Laser & Photonics Reviews, 2022, 16(2): 2100414.
|
| [4] |
SPITZ O, DIDIER P, DURUPT L, et al. Free-space communication with directly modulated mid-infrared quantum cascade devices[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2022, 28(1): 1200109.
|
| [5] |
温志渝, 王玲芳, 陈刚. 基于量子级联激光器的气体检测系统的发展与应用[J]. 光谱学与光谱分析,2010,30(8):2043-2048. doi: 10.3964/j.issn.1000-0593(2010)08-2043-06
WEN ZH Y, WANG L F, CHEN G. Development and application of quantum cascade laser based gas sensing system[J]. Spectroscopy and Spectral Analysis, 2010, 30(8): 2043-2048. (in Chinese). doi: 10.3964/j.issn.1000-0593(2010)08-2043-06
|
| [6] |
FATHOLOLOUMI S, DUPONT E, CHAN C W I, et al. Terahertz quantum cascade lasers operating up to ~200 K with optimized oscillator strength and improved injection tunneling[J]. Optics Express, 2012, 20(4): 3866-3876. doi: 10.1364/OE.20.003866
|
| [7] |
LI L H, CHEN L, ZHU J X, et al. Terahertz quantum cascade lasers with> 1 W output powers[J]. Electronics Letters, 2014, 50(4): 309-311. doi: 10.1049/el.2013.4035
|
| [8] |
VITIELLO M S, SCALARI G, WILLIAMS B, et al. Quantum cascade lasers: 20 years of challenges[J]. Optics Express, 2015, 23(4): 5167-5182. doi: 10.1364/OE.23.005167
|
| [9] |
BECK M, HOFSTETTER D, AELLEN T, et al. Continuous wave operation of a mid-infrared semiconductor laser at room temperature[J]. Science, 2002, 295(5553): 301-305. doi: 10.1126/science.1066408
|
| [10] |
LYAKH A, MAULINI R, TSEKOUN A, et al. 3 W continuous-wave room temperature single-facet emission from quantum cascade lasers based on nonresonant extraction design approach[J]. Applied Physics Letters, 2009, 95(14): 141113. doi: 10.1063/1.3238263
|
| [11] |
BAI Y B. High wall plug efficiency quantum cascade lasers[D]. Xi’an: Northwestern University, 2011.
|
| [12] |
BAI Y, BANDYOPADHYAY N, TSAO S, et al. Highly temperature insensitive quantum cascade lasers[J]. Applied Physics Letter, 2010, 97(25): 251104. doi: 10.1063/1.3529449
|
| [13] |
WANG F, SLIVKEN S, WU D H, et al. Continuous wave quantum cascade lasers with 5.6 W output power at room temperature and 41% wall-plug efficiency in cryogenic operation[J]. AIP Advances, 2020, 10(5): 055120. doi: 10.1063/5.0003318
|
| [14] |
NIU SH, YANG P CH, HUANG R X, et al. High power, broad tuning quantum cascade laser at λ ~8.9 µm[J]. Optics Express, 2023, 31(25): 41252-41258. doi: 10.1364/OE.505349
|
| [15] |
WANG C A, HUANG R K, GOYAL A, et al. OMVPE growth of highly strain-balanced GaInAs/AlInAs/InP for quantum cascade lasers[J]. Journal of Crystal Growth, 2008, 310(23): 5191-5197. doi: 10.1016/j.jcrysgro.2008.07.100
|
| [16] |
ROBERTS J S, GREEN R P, WILSON L R, et al. Quantum cascade lasers grown by metalorganic vapor phase epitaxy[J]. Applied Physics Letters, 2003, 82(24): 4221-4223. doi: 10.1063/1.1583858
|
| [17] |
BOTEZ D, KIRCH J D, BOYLE C, et al. High-efficiency, high-power mid-infrared quantum cascade lasers [Invited][J]. Optical Materials Express, 2018, 8(5): 1378-1398. doi: 10.1364/OME.8.001378
|
| [18] |
FEI T, ZHAI SH Q, ZHANG J CH, et al. 3 W continuous-wave room temperature quantum cascade laser grown by metal-organic chemical vapor deposition[J]. Photonics, 2023, 10(1): 47. doi: 10.3390/photonics10010047
|
| [19] |
FEI T, ZHAI SH Q, ZHANG J CH, et al. High power λ~ 8.5 μm quantum cascade laser grown by MOCVD operating continuous-wave up to 408 K[J]. Journal of Semiconductors, 2021, 42(11): 112301. doi: 10.1088/1674-4926/42/11/112301
|
| [20] |
SUN Y Q, YIN R, ZHANG J CH, et al. High-performance quantum cascade lasers at λ ~9 µm grown by MOCVD[J]. Optics Express, 2022, 30(21): 37272-37280. doi: 10.1364/OE.469573
|
| [21] |
庞磊, 程洋, 赵武, 等. 基于MOCVD生长的4.6 μm中红外量子级联激光器[J]. 红外与激光工程,2022,51(6):20210980. doi: 10.3788/IRLA20210980
PANG L, CHENG Y, ZHAO W, et al. Mid-infrared quantum cascade laser grown by MOCVD at 4.6 µm[J]. Infrared and Laser Engineering, 2022, 51(6): 20210980. (in Chinese). doi: 10.3788/IRLA20210980
|
| [22] |
孙永强, 费腾, 黎昆, 等. MOCVD生长的瓦级中波红外高功率量子级联激光器[J]. 光学学报,2022,42(22):2214002. doi: 10.3788/AOS202242.2214002
SUN Y Q, FEI T, LI K, et al. MOCVD-based mid-wave infrared quantum cascade lasers with watt-level power[J]. Acta Optica Sinica, 2022, 42(22): 2214002. (in Chinese). doi: 10.3788/AOS202242.2214002
|
| [23] |
SUTTINGER M, GO R, AZIM A, et al. High brightness operation in broad area quantum cascade lasers with reduced number of stages[C]. Proceedings of 2019 Conference on Lasers and Electro-Optics, IEEE, 2019: 1-2.
|
| [24] |
BISMUTO A, GRESCH T, BÄCHLE A, et al. Large cavity quantum cascade lasers with InP interstacks[J]. Applied Physics Letters, 2008, 93(23): 231104. doi: 10.1063/1.3042213
|
| [25] |
RYU J H, KIRCH J D, KNIPFER B, et al. Beam stability of buried-heterostructure quantum cascade lasers employing HVPE regrowth[J]. Optics Express, 2021, 29(2): 2819-2826. doi: 10.1364/OE.414489
|
| [26] |
XIE F, CANEAU C, LEBLANC H P, et al. Room temperature CW operation of short wavelength quantum cascade lasers made of strain balanced Ga xIn1- xAs/Al yIn1- y as material on InP substrates[J]. IEEE Journal of Selected Topics in Quantum Electronics, 2011, 17(5): 1445-1452. doi: 10.1109/JSTQE.2011.2136325
|
| [27] |
YU N F, DIEHL L, CUBUKCU E, et al. Near-field imaging of quantum cascade laser transverse modes[J]. Optics Express, 2007, 15(20): 13227-13235. doi: 10.1364/OE.15.013227
|
| [28] |
LEE H K, YU J S. Thermal effects in quantum cascade lasers at λ ~4.6 μm under pulsed and continuous-wave modes[J]. Applied Physics B, 2012, 106(3): 619-627.
|
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