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FU Yu-wei, WANG Rui-nan, TANG Wen-ting, DU Xi-zhao, WANG Wei, CHEN Hai-bin. MEMS silicon-glass fiber-optic FP pressure sensor for high pressure measurements[J]. Chinese Optics. doi: 10.37188/CO.2023-0224
Citation: FU Yu-wei, WANG Rui-nan, TANG Wen-ting, DU Xi-zhao, WANG Wei, CHEN Hai-bin. MEMS silicon-glass fiber-optic FP pressure sensor for high pressure measurements[J]. Chinese Optics. doi: 10.37188/CO.2023-0224

MEMS silicon-glass fiber-optic FP pressure sensor for high pressure measurements

doi: 10.37188/CO.2023-0224
Funds:  Supported by Key Research and Development Project of Shaanxi Province (No. 2023-GHZD-52); Key Research Programs of Shaanxi Provincial Education Department (No. 22JY026)
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  • Corresponding author: chenhaibin@xatu.edu.cn
  • Received Date: 18 Dec 2023
  • Accepted Date: 15 Apr 2024
  • Available Online: 10 May 2024
  • A silicon-glass fiber-optic Fabry-Perot (FP) pressure sensor based on micro-electro-mechanical systems (MEMS) technology for high pressure measurements is investigated, using silicon material as the sensitive element, the inductively coupled plasma (ICP) dry etched monocrystalline silicon diaphragm is anode bonded with a high borosilicate glass to form the FP cavity. The sensor head is manufactured in batch utilizing MEMS technology, which is structurally stable, strongly resistant to overload, and not prone to fail in high pressure environments. The experimental results show that the sensor is capable of realizing high pressure measurement up to 30 MPa with the sensitivity of 46.94 nm/MPa, and the linearity of 0.99897, with good consistency and reliability of the measurement results, and the designed pressure sensor has strong application prospects in high pressure sensing.


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