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LUO Xuan, MENG He-chen, WANG Xiao-dan, CHEN Zi-hang, ZENG Xiong-hui, GAO Xiao-dong, ZHENG Shu-nan, MAO Hong-min. Structure and cathodoluminescence properties in Dy3+ and Tb3+ doped AlN films[J]. Chinese Optics. doi: 10.37188/CO.2023-0219
Citation: LUO Xuan, MENG He-chen, WANG Xiao-dan, CHEN Zi-hang, ZENG Xiong-hui, GAO Xiao-dong, ZHENG Shu-nan, MAO Hong-min. Structure and cathodoluminescence properties in Dy3+ and Tb3+ doped AlN films[J]. Chinese Optics. doi: 10.37188/CO.2023-0219

Structure and cathodoluminescence properties in Dy3+ and Tb3+ doped AlN films

doi: 10.37188/CO.2023-0219
Funds:  Supported by National Natural Science Foundation of China (No. 61974158, No.61306004); Natural Science Fund of Jiangsu Province (No. BK20191456, No. BK20221263); Jiangsu Key Disciplines of the Fourteenth Five-Year Plan (No. 2021135); Postgraduate Research & Practice Innovation Program of Jiangsu Province (No. KYCX22_3266)
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  • For the first time, Tb3+ and Dy3+ co-doped AlN films were prepared using ion implantation, and their crystal structure and cathodoluminescence properties were investigated. Raman scattering and X-ray diffraction indicate that ion implantation has caused increased compressive stress within the internal lattice. Continuous implantation led to the recombination of some point defects, resulting in a partial release of internal compressive stress. Cathodoluminescence spectra demonstrated that with high-dose Tb3+ implantation, the emission intensity of Tb3+ and Dy3+ exhibited different trends with varying Dy3+ dosage. We propose the existence of an energy transfer mechanism from Tb3+ ions 5D47F6 to Dy3+ ions 6H15/24F9/2 in AlN films. Finally, we observe that varying the dose ratio of Dy3+ ions to Tb3+ ions shifted the emission color between yellow-green and orange-yellow, with color temperatures ranging from 4042 to 5119 K. Adjusting the dose ratio of Dy3+ to Tb3+ enables effective control of chromaticity coordinates and color temperatures.


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