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XUE Yi meng, LIU Bing cai, PAN Yong qiang, FANG Xin meng, TIAN Ai ling, ZHANG Rui xuan. Vortex phase-shifting digital holography for micro-optical element surface topography[J]. Chinese Optics. doi: 10.37188/CO.2023-0180
Citation: XUE Yi meng, LIU Bing cai, PAN Yong qiang, FANG Xin meng, TIAN Ai ling, ZHANG Rui xuan. Vortex phase-shifting digital holography for micro-optical element surface topography[J]. Chinese Optics. doi: 10.37188/CO.2023-0180

Vortex phase-shifting digital holography for micro-optical element surface topography

doi: 10.37188/CO.2023-0180
Funds:  Supported by Shaanxi Provincial Science and Technology Department Project (No. 2023KXJ-066); Shaanxi Province Education Department Project (No. 23JY034)
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  • Non-destructive, non-contact phase-shifting digital holography has distinct advantages in identifying micro-optical components. Because traditional phase-shifting digital holography requires fine control and cumbersome calibration of the phase shifter, its optical path is susceptible to mechanical vibration interference, which reduces the quality of the holographically reproduced image. This paper proposes a vortex phase-shifting digital holography for the micro-optical element surface measurement method with the help of the special phase distribution of vortex light. The method utilizes a helical phase plate to modulate the vortex phase and introduce a high-precision phase shift. Based on the constructed vortex phase-shifting digital holographic microscopy experimental setup, the actual phase shifts between phase-shift interferograms were determined using the interferometric polarity method, the relationship between the rotation angle of the helical phase plate and the phase shift was calibrated, and the feasibility of the vortex phase shift was experimentally verified. Repeated measurement experiments were carried out on the micro-lens arrays, and the measurement results were compared with those of the ZYGO white light interferometer. The results indicate that a single micro-lens's average longitudinal sagittal height is 12.897 μm with an average relative error of 0.155%. The proposed method enables highly precise measurement of the surface topography of micro-optical elements. It offers the advantages of easy operation, high stability, and high accuracy.


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