Volume 17 Issue 3
May  2024
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BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor[J]. Chinese Optics, 2024, 17(3): 521-527. doi: 10.37188/CO.2023-0148
Citation: BAO Ming-di, SHI Guo-hua, XING Li-na, HE Yi. High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor[J]. Chinese Optics, 2024, 17(3): 521-527. doi: 10.37188/CO.2023-0148

High-precision spherical wavefront calibration method for shack-hartmann wavefront sensor

doi: 10.37188/CO.2023-0148
Funds:  Supported by the National Natural Science Foundation of China (No. 62075235); The National Key Research and Development Program of China (No. 2021YFF0700700); Youth Innovation Promotion Association (No.2019320); The Strategic Priority Research Program of the Chinese Academy of Sciences (No. XDA16021304)
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  • To address the issues of low measurement accuracy and insufficient stability in traditional calibration methods for Shack-Hartmann wavefront sensors (SHWFS), we propose a high-precision absolute calibration method using spherical waves generated by sensor. A high-precision calibration method for spherical waves was obtained through theoretical derivation. Combined with the constructed spherical wave calibration experimental device, high-precision calibration was performed on the SHWFS with sub apertures of 128×128. The structural parameters of the SHWFS (f, w, and L0) are calculated precisely. The measurement accuracy of the SHWFS is verified after calibration. The experimental results demonstrate that by using this method to calibrate the SHWFS, its wavefront recovery accuracy reaches a PV of 1.376×10−2λ and an RMS of 4×10−3λ (where λ=625 nm), respectively. Additionally, its repeatability accuracy reaches a PV of 3.2×10−3λ and an RMS of 9.76×10-4λ (where λ=625 nm), respectively. These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aperture.


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