Turn off MathJax
Article Contents
XU Hao-Yu, JIANG Yan-Xiu, CHEN Xing-Shuo, WANG Rui-Peng, ZHANG Jing, Bayanheshig. Optimization of structural parameters and fabrication of small blazed angle monocrystalline silicon gratings[J]. Chinese Optics. doi: 10.37188/CO.2023-0056
Citation: XU Hao-Yu, JIANG Yan-Xiu, CHEN Xing-Shuo, WANG Rui-Peng, ZHANG Jing, Bayanheshig. Optimization of structural parameters and fabrication of small blazed angle monocrystalline silicon gratings[J]. Chinese Optics. doi: 10.37188/CO.2023-0056

Optimization of structural parameters and fabrication of small blazed angle monocrystalline silicon gratings

doi: 10.37188/CO.2023-0056
Funds:  Supported by National Natural Science Foundation of China (No. U21A20509); Key Core Technology Research Project of Chinese Academy of Sciences (No. 20200602051ZP); Natural Science Foundation of Jilin Province (No. 20210101139JC); Scientific Instrument and Equipment Development Project of Chinese Academy of Sciences (No. YJKYYQ20200003); Youth Innovation Promotion Association of the Chinese Academy of Sciences (No. 2022218)
More Information
  • In order to meet the requirements of the national synchrotron radiation source, the anisotropic wet-etching technology of small blazed angle monocrystalline silicon grating is studied, and the blazed grating suitable for the medium wave soft X-ray band is prepared. Based on the rigorously coupled wave theory, the structural parameters and process tolerance of the small blazed angle grating are designed. In the crystal alignment process, the crystal orientation of the silicon wafer is determined by ring-preetching, and then the grating mask is aligned with the crystal direction of monocrystalline silicon <111> based on the frequency doubling adjustment method. At the same time, the effect of the photoresist ashing technique and the active agent on the groove quality of the grating is investigated, and the scintillating gratings close to the ideal sawtooth groove shape are successfully prepared by the monocrystalline silicon anisotropic wet etching process. The experimental results show that the blazed angle of the prepared grating is 1°, the linear density is 1200 gr/mm, and the root mean square roughness of the blazed surface is less than 0.5nm. This method can be applied to the fabrication of the medium wave soft X-ray band blazed grating, which can greatly reduce the difficulty and cost of fabrication while achieving high diffraction efficiency.


  • loading
  • [1]
    焦毅, 潘卫民. 高能同步辐射光源[J]. 强激光与粒子束,2022,34(10):104002.

    JIAO Y, PAN W M. High energy photon source[J]. High Power Laser and Particle Beams, 2022, 34(10): 104002. (in Chinese)
    JIN S SH, ZHAO Y K, SUN B G, et al. Design of an interference system for measuring the transverse beam size in HLS-II[J]. International Journal of Optomechatronics, 2022, 16(1): 18-28. doi: 10.1080/15599612.2022.2048151
    JOSIFOVSKA N, ANDJELIC S, LUMI X, et al. Synchrotron-based FTIR microspectroscopy of human primary retinal pigmented epithelial cells as a model for age-related macular degeneration[J]. Acta Ophthalmologica, 2022, 100(S275). .
    NALETTO G, TONDELLO G, CIMINO R. Design of a high-flux low-energy synchrotron radiation monochromator[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2006, 556(1): 371-378.
    ALEXANDER J, BANERJEE N, VAN LOON L. Application of synchrotron radiation X-ray diffraction (SR-XRD) and electron probe microanalysis to understanding gold mineralization at the vertigo target, White Gold District, west-Central Yukon Territory, Canada[J]. Microscopy and Microanalysis, 2020, 26(S2): 994-997. doi: 10.1017/S1431927620016608
    WADDINGHAM M T, TSUCHIMOCHI H, SONOBE T, et al. Using synchrotron radiation imaging techniques to elucidate the actions of hexarelin in the heart of small animal models[J]. Frontiers in Physiology, 2022, 12: 766818. doi: 10.3389/fphys.2021.766818
    张宝庆, 于硕, 吉日嘎兰图, 等. 铝膜层数对机械刻划光栅塑性成槽过程的影响[J]. 塑性工程学报,2021,28(10):141-147.

    ZHANG B Q, YU SH, JIRIGALANTU, et al. Effect of aluminum film layer number on plastic grooving process of mechanical grating ruling[J]. Journal of Plasticity Engineering, 2021, 28(10): 141-147. (in Chinese)
    JIRIGALANTU, LI X T, ZHANG SH W, et al. Ruling of echelles and gratings with a diamond tool by the torque equilibrium method[J]. Applied Optics, 2016, 55(28): 8082-8088. doi: 10.1364/AO.55.008082
    MAMUN M A A, CADUSCH P J, KATKUS T, et al. Quantifying end-face quality of cleaved fibers: femtosecond laser versus mechanical scribing[J]. Optics and Laser Technology, 2021, 141: 107111. doi: 10.1016/j.optlastec.2021.107111
    王琼, 沈晨, 谭鑫, 等. 摆动刻蚀法制作高衍射效率凸面闪耀光栅[J]. 强激光与粒子束,2019,31(6):061001. doi: 10.11884/HPLPB201931.180298

    WANG Q, SHEN CH, TAN X, et al. Fabrication of high-efficiency convex blazed gratings by swing ion beam etching[J]. High Power Laser and Particle Beams, 2019, 31(6): 061001. (in Chinese) doi: 10.11884/HPLPB201931.180298
    ZHANG K D, LI H SH, ZHANG CH, et al. Effect of ion beam etching on the tribological performance of laser textured Co-Cr-Mo alloy[J]. Optics & Laser Technology, 2023, 160: 109097.
    SHEN CH, TAN X, JIAO Q B, et al. Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method[J]. Optics express, 2018, 26(19): 25381-25398. doi: 10.1364/OE.26.025381
    杨子江, 潘俏, 朱嘉诚, 等. 紫外光刻-湿法刻蚀硅中阶梯光栅的研制[J]. 光学学报,2023,43(13):1305001. doi: 10.3788/AOS230446

    YANG Z J, PAN Q, ZHU J CH, et al. Fabrication of silicon echelle grating by ultraviolet lithography combined with wet etching[J]. Acta Optica Sinica, 2023, 43(13): 1305001. (in Chinese) doi: 10.3788/AOS230446
    GAO J, CHEN P, WU L, et al. A review on fabrication of blazed gratings[J]. Journal of Physics D:Applied Physics, 2021, 54(31): 313001. doi: 10.1088/1361-6463/abfd6a
    聂秋玉. 基于偏晶向(111)硅基的MOEMS扫描光栅微镜关键技术研究[D]. 重庆: 重庆大学, 2017.

    NIE Q Y. Research on key technologies of MOEMS scanning grating mirror based on tilted (111) silicon wafer[D]. Chongqing: Chongqing University, 2017. (in Chinese)
    JIAO Q B, ZHU CH L, TAN X, et al. The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr/mm silicon echelle grating with low surface roughness in alkaline KOH solution[J]. Ultrasonics Sonochemistry, 2018, 40: 937-943. doi: 10.1016/j.ultsonch.2017.09.011
    SHENG B, XU X D, LIU Y, et al. Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask[J]. Optics Letters, 2009, 34(8): 1147-1149. doi: 10.1364/OL.34.001147
    VORONOV D L, LUM P, NAULLEAU P, et al. X-ray diffraction gratings: precise control of ultra-low blaze angle via anisotropic wet etching[J]. Applied Physics Letters, 2016, 109: 043112. doi: 10.1063/1.4960203
    MOKHOV D V, BEREZOVSKAYA T N, SHUBINA K Y, et al. Optimization of triangular-profiled Si-grating fabrication technology for EUV and SXR applications[J]. Technical Physics, 2022, 67(8): 1009-1014.
  • 加载中


    通讯作者: 陈斌, bchen63@163.com
    • 1. 

      沈阳化工大学材料科学与工程学院 沈阳 110142

    1. 本站搜索
    2. 百度学术搜索
    3. 万方数据库搜索
    4. CNKI搜索

    Figures(19)  / Tables(4)

    Article views(211) PDF downloads(59) Cited by()
    Proportional views


    DownLoad:  Full-Size Img  PowerPoint