凹非球面的非零位干涉检测技术

张旭; 李世杰; 刘丙才; 田爱玲; 梁海锋; 蔡长龙

doi:10.37188/CO.2023-0042

Volume 17 Issue 1

Jan. 2024

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Article Contents

Chinese Optics > 2024 > 17(1): 140-149.

ZHANG Xu, LI Shi-jie, LIU Bing-cai, TIAN Ai-ling, LIANG Hai-feng, CAI Chang-long. A non-null interferometry for concave aspheric surface[J]. Chinese Optics, 2024, 17(1): 140-149. doi: 10.37188/CO.2023-0042

Citation:

ZHANG Xu, LI Shi-jie, LIU Bing-cai, TIAN Ai-ling, LIANG Hai-feng, CAI Chang-long. A non-null interferometry for concave aspheric surface[J]. Chinese Optics, 2024, 17(1): 140-149. doi: 10.37188/CO.2023-0042

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A non-null interferometry for concave aspheric surface

doi: 10.37188/CO.2023-0042

School of Opto-Electronical Engineering, Xi’an Technological University, Xi’an 710021, China

Funds: Supported by Department of Science and Technology Project of Shaanxi Province (No. 2022GY-222, No. 2022GY-262); Basic Scientific Research (No. JCKY2020426B009)；"The Belt and Road" Foreign Experts Innovative Talent Exchange Project (No. DL2022040006L)

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Corresponding author: lishijie@xatu.edu.cn
Received Date: 13 Mar 2023
Rev Recd Date: 14 Apr 2023

Available Online: 26 Sep 2023

Abstract

Abstract

To realize the rapid, high-precision, and universal testing of concave aspheric surface, a non-null interferometry method is proposed in this paper, which takes the asphere as a spherical surface and measures it directly with an interferometer. Combined with the corresponding data processing methods, the test results of the aspheric surface are obtained. Firstly, the detection theory of this method is introduced, the calculation and removal models of retrace error and adjustment error are established, and the data processing method of shape error is studied. Secondly, taking two concave aspherical surfaces with different parameters as an example, the retrace error and adjustment error are simulated, which verified the effectiveness of the method. Finally, a non-null interferometry experimental setup of concave aspheric surface is performed, and its shape error is successfully obtained. By comparing the results with autocollimation method or LUPHOScan method, it is shown that the surface distribution and evaluation indicators of the results are highly consistent, which verifies the correctness of this method. This method provides an effective measurement method for concave aspheric surface with high precision, universality, and convenience.
- aspheric surface shape measurement,
- non-null interferometry,
- retrace error,
- data processing

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References(21)

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