Volume 16 Issue 1
Jan.  2023
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ZHU Qin-yu, CHEN Mei-rui, LU Huan-jun, FAN Li-na, PENG Jian-tao, SUN Hui-juan, XU Guo-ding, MAO Hong-min, CAO Zhao-liang. Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor[J]. Chinese Optics, 2023, 16(1): 94-102. doi: 10.37188/CO.2022-0176
Citation: ZHU Qin-yu, CHEN Mei-rui, LU Huan-jun, FAN Li-na, PENG Jian-tao, SUN Hui-juan, XU Guo-ding, MAO Hong-min, CAO Zhao-liang. Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor[J]. Chinese Optics, 2023, 16(1): 94-102. doi: 10.37188/CO.2022-0176

Analysis of influence of diffraction effect of microlens array on Shack-Hartmann wavefront sensor

doi: 10.37188/CO.2022-0176
Funds:  Supported by the Jiangsu Key Disciplines of the Fourteenth Five-Year Plan (No. 2021135); Industry-University-Institute Cooperation Foundation of the Eighth Research Institute of China Aerospace Science and Technology Corporation (No. SAST2020-025); Academic Research Projects of Beijing Union University (No. ZK70202007); the Natural Science Foundation of Jiangsu Province (No. BK20220640); the Natural Science Foundation of Jiangsu Higher Education Institutions (No. 22KJB150011)
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  • The diffraction effect of microlens array will affect the detection accuracy of Shack-Hartmann wavefront sensor. Based on Huygens-Fresnel diffraction theory, a two-dimensional microlens array diffraction model is established to simulate and analyze the two-dimensional diffraction spot array generated in the focal plane when the ideal parallel light is incident on the microlens array. First, the maximum centroid calculation error is determined by calculating the centroid error in the process of diffraction spot shifting by one pixel. Then the wavefront is reconstructed by using the modal method to obtain the wavefront detection error. The simulation results show that the maximum wavefront error caused by diffraction is 0.125 λ at 0.21 and 0.79 pixels offset, that is, when the wavefront deflection is 0.03° and 0.13°. Finally, an experiment is performed to verify the effectiveness of the error calculation method. This work provides a theoretical basis for the design of shack-Hartmann wavefront detector.

     

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