非球面光学元件面型检测技术研究进展与最新应用

梁子健; 杨甬英; 赵宏洋; 刘圣安

doi:10.37188/CO.2021-0143

Volume 15 Issue 2

Mar. 2022

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Chinese Optics > 2022 > 15(2): 161-186.

LIANG Zi-jian, YANG Yong-ying, ZHAO Hong-yang, LIU Sheng-an. Advances in research and applications of optical aspheric surface metrology[J]. Chinese Optics, 2022, 15(2): 161-186. doi: 10.37188/CO.2021-0143

Citation:

LIANG Zi-jian, YANG Yong-ying, ZHAO Hong-yang, LIU Sheng-an. Advances in research and applications of optical aspheric surface metrology[J]. Chinese Optics, 2022, 15(2): 161-186. doi: 10.37188/CO.2021-0143

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Advances in research and applications of optical aspheric surface metrology

doi: 10.37188/CO.2021-0143

State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China

Funds: Supported by National Natural Science Foundation of China (No. 61627825)

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Corresponding author: yyyang07@163.com
Received Date: 26 Jul 2021
Rev Recd Date: 26 Aug 2021

Available Online: 19 Oct 2021

Publish Date: 21 Mar 2022

Abstract

Abstract

Optical Systems using aspheric components (especially for free-form ones) have remarkable advantages over traditional spherical systems in that they can satisfy complicated requirements with simple optical-mechanical structures relying on abundant optional design parameters. Surface testing is an essential process for ensuring accuracy in manufacturing. Therefore, plenty of testing methods have been developed to meet varying testing demands of different types of surfaces at different stages in manufacturing. This paper summarizes the history of aspheric surface testing technology, classifies available techniques by whether they use interferometry, then introduces corresponding technical indexes, applicable conditions, research progress and applications. This paper highlights the high-precision interferometric methods, basic principles, optical layout and testing performances of every measurement method classified into Null and Non-null testing. The pros and cons of each method are compared, relative algorithms are introduced and precise adjustment methods are discussed.
- aspheric surface testing,
- free-form surface testing,
- interferometry,
- null testing,
- non-null testing

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References(124)

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