数字微镜器件（DMD）杂散光特性测试方法及装置

姚雪峰; 高毅; 龙兵; 于晨阳; 李文昊; 于宏柱; 张靖; 李晓天

doi:10.37188/CO.2021-0132

Volume 15 Issue 2

Mar. 2022

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Article Contents

Chinese Optics > 2022 > 15(2): 339-347.

YAO Xue-feng, GAO Yi, LONG Bing, YU Chen-yang, LI Wen-hao, YU Hong-zhu, ZHANG Jing, LI Xiao-tian. Method and device for testing stray light characteristics of Digital Micro-mirror Device (DMD)[J]. Chinese Optics, 2022, 15(2): 339-347. doi: 10.37188/CO.2021-0132

Citation:

YAO Xue-feng, GAO Yi, LONG Bing, YU Chen-yang, LI Wen-hao, YU Hong-zhu, ZHANG Jing, LI Xiao-tian. Method and device for testing stray light characteristics of Digital Micro-mirror Device (DMD)[J]. Chinese Optics, 2022, 15(2): 339-347. doi: 10.37188/CO.2021-0132

Citation:

YAO Xue-feng, GAO Yi, LONG Bing, YU Chen-yang, LI Wen-hao, YU Hong-zhu, ZHANG Jing, LI Xiao-tian. Method and device for testing stray light characteristics of Digital Micro-mirror Device (DMD)[J]. Chinese Optics, 2022, 15(2): 339-347. doi: 10.37188/CO.2021-0132

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Method and device for testing stray light characteristics of Digital Micro-mirror Device (DMD)

doi: 10.37188/CO.2021-0132

YAO Xue-feng^1
,,
GAO Yi^{2
,
,},
LONG Bing^{3
,
,},
YU Chen-yang⁴,
LI Wen-hao¹,
YU Hong-zhu¹,
ZHANG Jing^{1, 5},
LI Xiao-tian¹

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
Key Laboratory of Trace Testing and Identification Technology of the Ministry of Public Security, Criminal Investigation Police University of China, Shenyang 110035, China
3.
Key Laboratory of Sichuan Higher Education Criminal Science and Technology Laboratory (Sichuan Police College), Luzhou 646000, China
4.
China Electronics Technology Group Corporation(CETC10)，Chengdu 610036,China
5.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: Supported by Jilin Province Science and Technology Development Plan Project (No. 20210203053SF, No. 20190302047GX, No. 20190201104JC, No. 20200404197YY); Open Project of Key Laboratory of Criminal Inspection in Sichuan Universities (No. 2019ZD02); National Natural Science Foundation of China (No. 61975255, No. U2006209, No. 61505204); Special Project of the Ministry of Public Security on the Basic Work of Strengthening the Police Through Science and Technology (No. GABJC04); Major Scientific Research Fund Project of Liaoning Provincial Department of Education (No. ZGXJ2020002); Scientific Research Fund Project of China Criminal Police Academy (No. D2019036)

More Information

Corresponding author: 396406005@qq.com; longbing001122@163.com
Received Date: 29 Jun 2021
Rev Recd Date: 22 Jul 2021

Available Online: 16 Oct 2021

Publish Date: 21 Mar 2022

Abstract

Abstract

In order to obtain the true optical characteristics of a Digital Micro-mirror Device (DMD), a test method for the stray light distribution of the micro-mirror unit was proposed and an experimental device was built to test the stray light distribution of a micro-mirror unit in the 2×2 array area.First, a stray light test method is proposed. Then, in view of the small size of the micro-mirror unit and the flexible configuration mode, an illumination system with a continuously adjustable convergent spot size and an imaging system that can clearly image the micro-mirror unit was designed. Finally, the stray light distribution of the micro-mirror unit in the 2×2 array area was obtained through experimentation.The test results show that the reflection energy near the center channel of a single micro-mirror unit is strong, while the reflection energy near the edge is relatively weak. In addition, the micro-mirror unit also reflects part of the energy outside the test area. The maximum absolute stray light intensity of the micro-mirror unit in the test area appears near the central channel, and its gray value is 6.86. The maximum absolute stray light intensity of the micro-mirror unit close to the test area also appears near the central channel, and its gray value is 4.01, which indicates that the stray light near the central channel is strong. The relative intensity of stray light in the test area is relatively weak, which increases sharply from the edge of the test area and reaches the value of 293.5% after about two micro-mirror units, and then decreases sharply.
- DMD,
- micro-mirror unit,
- stray light analysis,
- imaging properties,
- precision measurement

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References(16)

References

[1]	肖文健, 许振领, 周旋风. DMD红外场景产生器非均匀性校正方法研究[J]. 红外技术,2021,43(1):21-25. XIAO W J, XU ZH L, ZHOU X F. Nonuniformity correction of infrared scene simulator based on DMD[J]. Infrared Technology, 2021, 43(1): 21-25. (in Chinese)
[2]	谢熙伟, 胡静, 沈亦兵. 基于数字微镜器件随机编码调制的相位成像[J]. 光学学报,2020,40(23):2311001. doi: 10.3788/AOS202040.2311001 XIE X W, HU J, SHEN Y B. Phase imaging based on random coding modulation of digital micro-mirror device[J]. Acta Optica Sinica, 2020, 40(23): 2311001. (in Chinese) doi: 10.3788/AOS202040.2311001
[3]	张冬华, 王晓荣, 郑蕊, 等. 基于DMD的拉曼光谱检测模块设计[J]. 仪表技术与传感器,2020(11):33-35,39. doi: 10.3969/j.issn.1002-1841.2020.11.007 ZHANG D H, WANG X R, ZHENG R, et al. Design of Raman spectral detection module based on DMD[J]. Instrument Technique and Sensor, 2020(11): 33-35,39. (in Chinese) doi: 10.3969/j.issn.1002-1841.2020.11.007
[4]	LI SH B, LIANG R G. DMD-based three-dimensional chromatic confocal microscopy[J]. Applied Optics, 2020, 59(14): 4349-4356. doi: 10.1364/AO.386863
[5]	苏渝阳, 王治乐, 陆敏, 等. 红外目标模拟系统DMD成像非均匀性分析及校正[J]. 应用光学,2020,41(5):1074-1081. doi: 10.5768/JAO202041.0506002 SU Y Y, WANG ZH L, LU M, et al. Nonuniformity analysis and correction of DMD imaging in infrared target simulation system[J]. Journal of Applied Optics, 2020, 41(5): 1074-1081. (in Chinese) doi: 10.5768/JAO202041.0506002
[6]	李轶庭, 王灵杰, 张玉慧, 等. 天基平台宽谱段成像光学系统设计[J]. 中国光学,2021,14(6):1495-1503. doi: 10.37188/CO.2019-0255 LI Y T, WANG L J, ZHANG Y H, et al. Optical design of visual and infrared imaging system of space-based platform[J]. Chinese Optics, 2021, 14(6): 1495-1503. (in Chinese) doi: 10.37188/CO.2019-0255
[7]	CHLIPALA M, KOZACKI T. Color LED DMD holographic display with high resolution across large depth[J]. Optics Letters, 2019, 44(17): 4255-4258. doi: 10.1364/OL.44.004255
[8]	ZHOU J, QIAO Y, SUN ZH, et al. Design of a dual DMDs camera for high dynamic range imaging[J]. Optics Communications, 2019, 452: 140-145. doi: 10.1016/j.optcom.2019.07.008
[9]	LU B W, CUI X F, JIN G, et al. Effect of La₂O₃ addition on mechanical properties and wear behaviour of NiTi alloy fabricated by direct metal deposition[J]. Optics &Laser Technology, 2020, 129: 106290.
[10]	王美昌, 于斌, 张炜, 等. 基于数字微镜器件的数字线扫描荧光显微成像技术[J]. 物理学报,2020,69(23):238701. doi: 10.7498/aps.69.20200908 WANG M CH, YU B, ZHANG W, et al. Digital line scanning fluorescence microscopy based on digital micromirror device[J]. Acta Physica Sinica, 2020, 69(23): 238701. (in Chinese) doi: 10.7498/aps.69.20200908
[11]	陈雪旗, 姜爱民, 莫小范. 基于DMD的时变目标模拟研究[J]. 天文研究与技术,2020,17(3):357-365. CHEN X Q, JIANG A M, MO X F. Time-varying source simulation research based on digital micromirror device[J]. Astronomical Research and Technology, 2020, 17(3): 357-365. (in Chinese)
[12]	张一, 余卿, 张昆, 等. 基于数字微镜器件的并行彩色共聚焦测量系统[J]. 光学精密工程,2020,28(4):859-866. ZHANG Y, YU Q, ZHANG K, et al. Parallel chromatic confocal measurement system based on digital micromirror device[J]. Optics and Precision Engineering, 2020, 28(4): 859-866. (in Chinese)
[13]	李卓, 叶宗民, 牟达. 基于DMD的长波红外景象生成器分光构架设计[J]. 长春理工大学学报(自然科学版),2019,42(5):37-40,56. LI ZH, YE Z M, MU D. Design of spectrum frame of LWIR scene simulator based on DMD[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2019, 42(5): 37-40,56. (in Chinese)
[14]	姚雪峰, 崔继承, 尹禄, 等. 中阶梯光栅光谱仪波段范围校正装置[J]. 光学精密工程,2017,25(2):304-311. doi: 10.3788/OPE.20172502.0304 YAO X F, CUI J CH, YIN L, et al. Calibration devices for band range of echelle spectrometer[J]. Optics and Precision Engineering, 2017, 25(2): 304-311. (in Chinese) doi: 10.3788/OPE.20172502.0304
[15]	邢思远, 王超, 徐淼, 等. 数字微镜器件超分辨成像光学系统装调误差影响研究[J]. 中国光学,2021,14(5):1194-1201. XING S Y, WANG C H, XU M, et al. Influence of alignment error on DMD super-resolution imaging optical system[J]. Chinese Optics, 2021, 14(5): 1194-1201. (in Chinese)
[16]	吕博, 冯睿, 寇伟, 等. 折反射式空间相机光学系统设计与杂散光抑制[J]. 中国光学,2020,71(4):822-831. LV B, FENG R, KOU W, et al. Optical system design and stray light suppression of catadioptric space camera[J]. Chinese Optics, 2020, 71(4): 822-831. (in Chinese)