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YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Fabrication of gold microarray electrode based on DMD lithography and electrodeposition[J]. Chinese Optics. doi: 10.37188/CO.2021-0109
Citation: YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Fabrication of gold microarray electrode based on DMD lithography and electrodeposition[J]. Chinese Optics. doi: 10.37188/CO.2021-0109

Fabrication of gold microarray electrode based on DMD lithography and electrodeposition

doi: 10.37188/CO.2021-0109
Funds:  Supported by National Natural Science Foundation of China (No. 61875036); Jilin Scientific and Technological Development Program (No. 20190302049GX).
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  • In order to improve the detection efficiency of micro array electrodes (MAE) and reduce the production cost, a technology combining digital micromirror device (DMD) maskless projection lithography with electrochemical deposition was proposed. Firstly, a user-defined micro structure array was fabricated by using the advantages of PZS high resolution motion and DMD flexibility. And a uniform Au micro array electrode (Au/MAE)was fabricated by electrodeposition. Then, the electrochemical properties of Au/MAE with different structures were compared by cyclic voltammetry, and the optimized structural parameters were obtained. Finally, the current response of optimized Au/MAE to glucose with different concentrations and pH values were studied, and the anti-interference of Au/MAE in glucose detection was tested by chronoamperometry. Electrochemical analysis shows that the simple Au/MAE has a significant amperometric response and strong anti-interference ability for the electrochemical detection of glucose with a sensitivity of 101 μA·cm−2·mM−1. This method has the advantages of high resolution, high consistency, simple process and low cost, which provides a feasible operation scheme for the fabrication of biosensor array.
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