Volume 15 Issue 3
May  2022
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YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition[J]. Chinese Optics, 2022, 15(3): 592-607. doi: 10.37188/CO.2021-0109
Citation: YANG Dong-fang, LU Zi-feng, LIU Hua, SHAN Gui-ye. Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition[J]. Chinese Optics, 2022, 15(3): 592-607. doi: 10.37188/CO.2021-0109

Structural optimization and performance testing of gold microarray electrode fabricated by DMD lithography and electrodeposition

Funds:  Supported by National Natural Science Foundation of China (No. 61875036); Jilin Scientific and Technological Development Program (No. 20190302049GX).
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  • Author Bio:

    Yang Dongfang (1995—), female, born in Xinzhou, Shanxi, is now a master candidate in the School of Physics, Northeast Normal University, mainly engaged in the research of micro-nano processing, DMD lithography and other aspects. E-mail: 873717301@qq.com

    Zifeng Lu (1974—), female, born in Suibin Farm, Suibin County, Heilongjiang Province, ph. D., now is a teacher in the School of Physics, Northeast Normal University, mainly engaged in the research of micro-nano processing, 3D printing and other aspects. E-mail: luzf934@nenu.edu.cn

    Liu Hua (1976—), female, born in Fushun, Liaoning Province, Ph.D., now is a professor in the School of Physics, Northeast Normal University, mainly engaged in the research on 3D micro-nano printing of photosensitive materials and glass materials. E-mail: liuh146@nenu.edu.cn

  • Corresponding author: liuh146@nenu.edu.cn
  • Received Date: 14 May 2021
  • Rev Recd Date: 02 Jun 2021
  • Available Online: 16 Oct 2021
  • Publish Date: 20 May 2022
  • In order to improve the detection efficiency of Micro Array Electrodes (MAE) and reduce the production cost, a technology combining Digital Micromirror Device (DMD) maskless projection lithography with electrochemical deposition was proposed. Firstly, a user-defined micro array was fabricated by using the advantages of lithography system such as high-resolution PZS motion and imaging flexibility of DMD. And a uniform Au microarray electrode (Au/MAE) was fabricated after obtaining an Au conducting layer by electrodeposition. Then, the electrochemical properties of Au/MAE with different structures were compared by cyclic voltammetry, and the optimized structural parameters were obtained. Finally, the current response of optimized Au/MAE to the glucose with different concentrations and pH values was studied, and the anti-interference of Au/MAE in glucose detection was tested by chronoamperometry. The electrochemical analysis shows that the simple Au/MAE has a significant amperometric response, a strong anti-interference ability and a sensitivity of 101 μA·cm−2·mM−1 in the electrochemical detection of glucose. This method has the advantages of high resolution, high consistency, simple process and low cost, which provides a feasible operation scheme for the fabrication of biosensor array.

     

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  • [1]
    ZHONG SH L, ZHUANG J Y, YANG D P, et al. Eggshell membrane-templated synthesis of 3D hierarchical porous Au networks for electrochemical nonenzymatic glucose sensor[J]. Biosensors and Bioelectronics, 2017, 96: 26-32. doi: 10.1016/j.bios.2017.04.038
    [2]
    KAYRAN Y U, JAMBREC D, SCHUHMANN W. Nanostructured DNA microarrays for dual SERS and electrochemical read-out[J]. Electroanalysis, 2019, 31(2): 267-272. doi: 10.1002/elan.201800579
    [3]
    PODESVA P, LIU X CH, PUMERA M, et al. Tailorable nanostructured mercury/gold amalgam electrode arrays with varied surface areas and compositions[J]. Sensors and Actuators B:Chemical, 2020, 302: 127175. doi: 10.1016/j.snb.2019.127175
    [4]
    TANG Y. In(NO3)3 induced tailoring of ZnO Nanorods' optical properties by electrodeposition[J]. Chinese Journal of Luminescence, 2020, 41(5): 571-578. (in Chinese) doi: 10.3788/fgxb20204105.0571
    [5]
    PIYA R, ZHU Y, SOERIYADI A H, et al. Micropatterning of porous silicon Bragg reflectors with poly (ethylene glycol) to fabricate cell microarrays: towards single cell sensing[J]. Biosensors and Bioelectronics, 2019, 127: 229-235. doi: 10.1016/j.bios.2018.12.001
    [6]
    CAI Y H, GAO X, WANG J H, et al. Output characteristics of Broad-area stripe semiconductor lasers with microthermal channel anode structure[J]. Chinese Journal of Luminescence, 2021, 42(4): 518-525. (in Chinese) doi: 10.37188/CJL.20200365
    [7]
    ZHAO W, ZHANG R L, XU SH, et al. Molecularly imprinted polymeric nanoparticles decorated with Au NPs for highly sensitive and selective glucose detection[J]. Biosensors and Bioelectronics, 2018, 100: 497-503. doi: 10.1016/j.bios.2017.09.020
    [8]
    WANG L Y, LIU K W, CHEN X, et al. Fabrication and characteristics of MgZnO ultraviolet detector based on Ag microporous array structure electrode[J]. Chinese Journal of Luminescence, 2021, 42(2): 201-207. (in Chinese) doi: 10.37188/CJL.20200362
    [9]
    MIR M, DONDAPATI S K, DUARTE M V, et al. Electrochemical biosensor microarray functionalized by means of biomolecule friendly photolithography[J]. Biosensors and Bioelectronics, 2010, 25(9): 2115-2121. doi: 10.1016/j.bios.2010.02.012
    [10]
    AN L, WANG G T, HAN Y, et al. Electrochemical biosensor for cancer cell detection based on a surface 3D micro-array[J]. Lab on a Chip, 2018, 18(2): 335-342. doi: 10.1039/C7LC01117B
    [11]
    TANG Y, ZHAO Y, ZHANG Z G, et al. Hydrothermal synthesis and properties of ZnO nanorod arrays[J]. Chinese Journal of Materials Research, 2015, 29(7): 529-534. (in Chinese) doi: 10.11901/1005.3093.2014.434
    [12]
    PALA K, SUBHAS C, KUNDUB C, VAMSI K, et al. Biosensing using photolithographically micropatterned electrodes ofPEDOT:PSS on ITO[J]. Sensors and Actuators B:Chemical, 2017, 242: 140-147. doi: 10.1016/j.snb.2016.11.049
    [13]
    XIAO X Z, LÜ C, WANG G, et al. Flexible triboelectric nanogenerator from micro-nano structured polydimethylsiloxane[J]. Chemical Research in Chinese Universities, 2015, 31(3): 434-438. doi: 10.1007/s40242-015-4432-8
    [14]
    RAYMUNDO-PEREIRA P A, SHIMIZU F M, COELHO D, et al. A nanostructured bifunctional platform for sensing of glucose biomarker in artificial saliva: synergy in hybrid Pt/Au surfaces[J]. Biosensors and Bioelectronics, 2016, 86: 369-376. doi: 10.1016/j.bios.2016.06.053
    [15]
    VERMA A K, DAS R, SONI R K. Laser fabrication of periodic arrays of microsquares on silicon for SERS application[J]. Applied Surface Science, 2018, 427: 133-140. doi: 10.1016/j.apsusc.2017.08.143
    [16]
    CHEN R H, LIU H, ZHANG H L, et al. Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique[J]. Optics Express, 2017, 25(18): 21958-21968. doi: 10.1364/OE.25.021958
    [17]
    XIONG ZH, LIU H, CHEN R H, et al. Illumination uniformity improvement in digital micromirror device based scanning photolithography system[J]. Optics Express, 2018, 26(14): 18597-18607. doi: 10.1364/OE.26.018597
    [18]
    LI Q K, XIAO Y, LIU H, et al. Analysis and correction of the distortion error in a DMD based scanning lithography system[J]. Optics Communications, 2019, 434: 1-6. doi: 10.1016/j.optcom.2018.10.042
    [19]
    ZHANG Y, LUO J, XIONG ZH, et al. User-defined microstructures array fabricated by DMD based multistep lithography with dose modulation[J]. Optics Express, 2019, 27(22): 31956-31966. doi: 10.1364/OE.27.031956
    [20]
    QIU C C, WANG X, LIU X Y, et al. Direct electrochemistry of glucose oxidase immobilized on nanostructured gold thin films and its application to bioelectrochemical glucose sensor[J]. Electrochimica Acta, 2012, 67: 140-146. doi: 10.1016/j.electacta.2012.02.011
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