Volume 14 Issue 4
Jul.  2021
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FAN Zhi-bin, CHEN Ze-ming, ZHOU Xin, HE Xin-tao, JIANG Shao-ji, DONG Jian-wen. Recent advances in silicon nitride-based photonic devices and applications[J]. Chinese Optics, 2021, 14(4): 998-1018. doi: 10.37188/CO.2021-0093
Citation: FAN Zhi-bin, CHEN Ze-ming, ZHOU Xin, HE Xin-tao, JIANG Shao-ji, DONG Jian-wen. Recent advances in silicon nitride-based photonic devices and applications[J]. Chinese Optics, 2021, 14(4): 998-1018. doi: 10.37188/CO.2021-0093

Recent advances in silicon nitride-based photonic devices and applications

doi: 10.37188/CO.2021-0093
Funds:  Supported by National Natural Science Foundation of China (No. 62035016, No. 61805288, No. 11904421); Guangdong Basic and Applied Basic Research Foundation (No. 2020A1515110661)
More Information
  • Corresponding author: dongjwen@mail.sysu.edu.cn
  • Received Date: 25 Apr 2021
  • Rev Recd Date: 08 Jun 2021
  • Available Online: 25 Jun 2021
  • Publish Date: 01 Jul 2021
  • Silicon nitride provides a CMOS-compatible integrated photonic platform with rich optical properties. By adjusting the relevant fabrication parameters, silicon nitride with specific refractive index between 1.9~3.2 can be achieved, and its extinction and nonlinear coefficient can have a large adjustable range. Silicon nitride has wide potential applications in many fields such as thin film optics, micro-nano planar optics and nonlinear integrated photonics. In this paper, we review the optical properties of silicon nitride and its recent advances in optical film, micro-nano metamaterial and silicon photonics, and also review the research progresses on the applications of solar thin films, visible metasurfaces, grating couplers and nonlinear optical waveguides.


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