Volume 15 Issue 1
Jan.  2022
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WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J]. Chinese Optics, 2022, 15(1): 119-131. doi: 10.37188/CO.2021-0092
Citation: WANG Kai-xuan, CHEN Gang, LIU Ding-quan, MA Chong, ZHANG Qiu-yu. Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band[J]. Chinese Optics, 2022, 15(1): 119-131. doi: 10.37188/CO.2021-0092

Fabrication of an ultra-narrow band-pass filter with 60 pm bandwidth in green light band

doi: 10.37188/CO.2021-0092
Funds:  Supported by Natural Science Foundation of Shanghai Municipality, China (No. 17ZR1434900)
More Information
  • Author Bio:

    Wang Kai-xuan (1992—), male, born in Bozhou, Anhui Province. Doctor. He received his Bachelor’s degree from Beijing University of Aeronautics and Astronautics in 2013. Now he mainly engages in the research of optical thin film materials and devices. E-mail: wangkx@shanghaitech.edu.cn

    Chen Gang (1983—), male, born in Yinxian County, Zhejiang Province. Doctor and senior engineer. He mainly engages in the design, development and space application of optical films. E-mail: gangchen@mail.sitp.ac.cn

    Liu Ding-quan (1964—), male, born in Chenggu, Shaanxi Province. Doctor, doctoral supervisor and researcher. Currently he is the director of the research office of optical films, materials and devices, and the distinguished professor of Shanghai University of Science and Technology. His research is focused on the thin film optics and technology, infrared optical thin film and space application, and micro nano optics, etc. E-mail: dqliu@mail.sitp.ac.cn

  • Corresponding author: dqliu@mail.sitp.ac.cn
  • Received Date: 23 Apr 2021
  • Accepted Date: 11 Aug 2021
  • Rev Recd Date: 21 May 2021
  • Available Online: 11 Aug 2021
  • Publish Date: 19 Jan 2022
  • Owing to the strong penetrating ability in the atmosphere, 532 nm-wavelength green laser has wide applications including free-space optical communications and laser three-dimensional mapping. A spectral filter, with a half-power bandwidth of less than 100 pm, is an important optical element to suppress the interference of background light. Therefore, an ultra-narrow band-pass filter based on optical interference film is designed and fabricated in this paper. The high and low refractive index film are made of tantalum pentoxide (Ta2O5) and silicon dioxide (SiO2), respectively. The designed optical thin films are deposited on a fused quartz substrate by double-ion-beam sputtering deposition method. The transmission spectra of the filters are measured by a tunable laser and a power meter. The half-power bandwidths of the filters are (60±2) pm, and the transmittance reaches 62.6%.


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  • [1]
    YU A W, STEPHEN M A, LI S X, et al. Space laser transmitter development for ICESat-2 mission[J]. Proceedings of SPIE, 2010, 7578: 757809. doi: 10.1117/12.843342
    SAWRUK N W, STEPHEN M A, LITVINOVITCH S, et al. Space qualified laser transmitter for NASA’s ICESat-2 mission[J]. Proceedings of SPIE, 2013, 8599: 85990O. doi: 10.1117/12.2005590
    GAO SH J, WU J B, LIU Y K, et al. Development status and trend of micro-satellite laser communication systems[J]. Chinese Optics, 2020, 13(6): 1171-1181. (in Chinese) doi: 10.37188/CO.2020-0033
    DONG Q R, CHEN T, GAO SH J, et al. Progress of research on satellite-borne laser communication technology[J]. Chinese Optics, 2019, 12(6): 1260-1270. (in Chinese) doi: 10.3788/co.20191206.1260
    TROUPAKI E, DENNY Z H, WU S, et al. Space qualification of the optical filter assemblies for the ICESat-2/ATLAS instrument[J]. Proceedings of SPIE, 2015, 9346: 93460H.
    WANG J Y, SHU R, LIU Y N, et al.. Introduction to Imaging Spectroscopy[M]. Beijing: Science Press, 2011: 90-110. (in Chinese)
    HAN F, LIU H J, SUN D S, et al. An ultra-narrow bandwidth filter for daytime wind measurement of direct detection Rayleigh lidar[J]. Current Optics and Photonics, 2020, 4(1): 69-80.
    GAYEN S K, BILLMERS R I, CONTARINO V M, et al. Induced-dichroism-excited atomic line filter at 532 nm[J]. Optics Letters, 1995, 20(12): 1427-1429. doi: 10.1364/OL.20.001427
    XU CH, XIAO O L, MA J Y, et al. High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta2O5 films[J]. Applied Surface Science, 2008, 254(20): 6554-6559. doi: 10.1016/j.apsusc.2008.04.034
    ZHAO Q, PU Y T, HAO L, et al. Residual stress and laser-induced damage of ion-beam sputtered Ta2O5/SiO2 mixture coatings[J]. Thin Solid Films, 2015, 592: 221-224. doi: 10.1016/j.tsf.2015.06.023
    LV Q P, HUANG M L, ZHANG SH Q, et al. Effects of annealing on residual stress in Ta2O5 films deposited by dual ion beam sputtering[J]. Coatings, 2018, 8(4): 150. doi: 10.3390/coatings8040150
    KIM S H, HWANGBO C K. Derivation of the center-wavelength shift of narrow-bandpass filters under temperature change[J]. Optics Express, 2004, 12(23): 5634-5639. doi: 10.1364/OPEX.12.005634
    TANG J F, GU P F, LIU X, et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006: 144-146. (in Chinese)
    MACLEOD H A. Thin-Film Optical Filters[M]. Boca Raton: Taylor & Francis, 2010: 310-313.
    CHEN G. Research on the near infrared optical properties of several metal oxide thin films and narrow bandpass filters for space remote sensing[D]. Shanghai: Shanghai Institute of Technical Physics Chinese Academy of Sciences, 2020: 56-68. (in Chinese)
    CHANELIERE C, AUTRAN J L, DEVINE R A B, et al. Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications[J]. Materials Science and Engineering:R:Reports, 1998, 22(6): 269-322. doi: 10.1016/S0927-796X(97)00023-5
    YUAN W J, SHEN W D, ZHENG X W, et al. Optical and mechanical properties and microstructures of Nb2O5, Ta2O5 and SiO2 thin films prepared by ion beam sputtering[J]. Acta Optica Sinica, 2017, 37(12): 1231001. (in Chinese)
    JIANG Y G, LIU H S, CHEN D, et al. Ultraviolet absorption film technology based on ion beam sputtering Ta2O5 thin films[J]. Optics and Precision Engineering, 2019, 27(3): 527-532. (in Chinese) doi: 10.3788/OPE.20192703.0527
    SHANG P, XIONG SH M, LI L H, et al. Optical constants and properties of dual-ion-beam sputtering Ta2O5/SiO2 thin film by spectroscopy[J]. Acta Optica Sinica, 2014, 34(5): 0531002. (in Chinese) doi: 10.3788/AOS201434.0531002
    WU Q D. Nucleation and growth of vapor phase deposition on solid surfaces[J]. Vacuum, 1990, 41(4-6): 1431-1433. doi: 10.1016/0042-207X(90)93980-W
    WAKAKI M, KUDO K, SHIBUYA T. Physical Properties and Data of Optical Materials[M]. Boca Raton: CRC Press, 2007: 301-330.
    ZHU X D, ZHANG R J, ZHENG Y X, et al. Spectroscopic ellipsometry and its applications in the study of thin film materials[J]. Chinese Optics, 2019, 12(6): 1195-1234. (in Chinese) doi: 10.3788/co.20191206.1195
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