Volume 14 Issue 2
Mar.  2021
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ZHANG Lei, WU Jin-ling, LIU Ren-hu, YU Ben-li. Research advances in adaptive interferometry for optical freeform surfaces[J]. Chinese Optics, 2021, 14(2): 227-244. doi: 10.37188/CO.2020-0126
Citation: ZHANG Lei, WU Jin-ling, LIU Ren-hu, YU Ben-li. Research advances in adaptive interferometry for optical freeform surfaces[J]. Chinese Optics, 2021, 14(2): 227-244. doi: 10.37188/CO.2020-0126

Research advances in adaptive interferometry for optical freeform surfaces

doi: 10.37188/CO.2020-0126
Funds:  Supported by National Natural Science Foundation of China (No. 61705002, No. 61675005, No. 61905001, No. 41875158); Anhui Natural Science Foundation (No. 1808085QF198, No. 1908085QF276); Research project of Anhui University (No. J01003208); National key Research and Development Program (No. 2016YFC0301900, No. 2016YFC0302202)
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  • Corresponding author: optzl@ahu.edu.cn
  • Received Date: 17 Jul 2020
  • Rev Recd Date: 17 Aug 2020
  • Available Online: 14 Oct 2020
  • Publish Date: 23 Mar 2021
  • Optical free-form surfaces are difficult to detect due to their rich degrees of freedom. Interference detection methods are both highly precise and non-contact. However, the static compensator in a traditional interferometer faces difficulty in achieving in-situ tests of unknown surface shapes or those changing during fabrication. Therefore, programmable adaptive compensators for large dynamic ranges have become a well-researched topic in recent years. Combined with the research work in the field of freeform surface metrology, we introduce the latest research progress in adaptive interferometry for optical freeform surfaces. Adaptive interferometers based on a Deformable Mirror (DM) or Liquid Crystal Spatial Light Modulator (LC-SLM) are analyzed in detail. An adaptive controlling algorithm in the adaptive interferometer is introduced as well. Finally, the advantages and development bottleneck of the above two kinds of adaptive interferometry are summarized and the prospects for the future development of freeform surface adaptive interferometers are proposed.


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