Volume 13 Issue 5
Sep.  2020
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ZOU Jing-wu, YU Qing, CHENG Fang. Differential chromatic confocal roughness evaluation system and experimental research[J]. Chinese Optics, 2020, 13(5): 1103-1114. doi: 10.37188/CO.2020-0029
Citation: ZOU Jing-wu, YU Qing, CHENG Fang. Differential chromatic confocal roughness evaluation system and experimental research[J]. Chinese Optics, 2020, 13(5): 1103-1114. doi: 10.37188/CO.2020-0029

Differential chromatic confocal roughness evaluation system and experimental research

doi: 10.37188/CO.2020-0029
Funds:  Supported by National Natural Science Foundation of China (No. 51505162); Foreign Cooperation Projects of Fujian, China (No.2019I0013); Excellent Outstanding Youth Foundation of Fujian Province of China (No. 2018J06014); Subsidized Project for Postgraduates’ Innovative Fund in Scientific Research of Huaqiao University (No. 18013080065)
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  • In order to meet the demand of large-area surface roughness measurement, a non-contact differential measurement system based on chromatic confocal sensors is presented in this paper. In the proposed system, two chromatic sensors and an optical flat, forming a differential measurement structure, are coupled with the motion system with a ball-to-socket connection. Using this differential configuration, the straightness error of the motion system is compensated and the measurement accuracy can be effectively improved. Based on this system, the methodology of surface roughness measurement, error compensation and measurement performance evaluation is established. In order to verify the measurement performance of the proposed system, standard step heights and roughness comparators are measured. For the step height measurement, the experimental results show that in the travel range of 60 mm, the standard deviation of the proposed system in six repeated measurements is 0.16 μm and the relative standard deviation RSD is 0.054%. From the results, it can be concluded that the straightness error of the motion system has been effectively overcome. When measuring the roughness comparators, the measurement errors of Ra and Rq are 0.032 μm and 0.073 μm, respectively. Therefore, the roughness measurement capability of the proposed system meets the requirements of most engineering applications.

     

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