基于自由曲面反射镜的低投射比超短焦投影物镜的光学设计

于百华; 田志辉; 苏东奇; 隋永新; 杨怀江

doi:10.3788/CO.20201302.0363

基于自由曲面反射镜的低投射比超短焦投影物镜的光学设计

于百华^{1, 2,},
田志辉^{1, 3},
苏东奇^{1, 3},
隋永新^{1, 3},
杨怀江^{1, 3, ,}

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
中国科学院大学, 北京 100049
3.
长春国科精密光学技术有限公司, 吉林长春 130033

基金项目:

国家科技重大专项 2009ZX02205

国家科技重大专项 2016ZX02201

详细信息

中图分类号: O435.1
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出版历程
- 收稿日期: 2019-04-23
- 修回日期: 2019-05-08
- 刊出日期: 2020-04-01

Optical design of an ultra-short-focus projection system with low throw ratio based on a freeform surface mirror

doi: 10.3788/CO.20201302.0363

YU Bai-hua^{1, 2
,},
TIAN Zhi-hui^{1, 3},
SU Dong-qi^{1, 3},
SUI Yong-xin^{1, 3},
YANG Huai-jiang^{1, 3
, ,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
Changchun National Extreme Precision Optics Co., Ltd, Changchun 130033, China

Funds:

the National Science and Technology Major Project of China 2009ZX02205

the National Science and Technology Major Project of China 2016ZX02201

More Information

Author Bio:
YU Bai-hua(1991—), Ph.D, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences.Her research interests are on ultra-short-focus projection system optical design based on freeform surface.E-mail:ybh886655@163.com

YANG Huai-jiang(1966—), Ph.D, Professor, His research interests are on ultraviolet lithography and information security.E-mail:yanghuaijiang@cnepo.com.cn

Corresponding author: YANG Huai-jiang, E-mail:yanghuaijiang@cnepo.com.cn

摘要

摘要: 为了设计低投射比的超短焦投影物镜，本文采用自由曲面和折反式的光路结构设计了一种具有低投射比的超短焦投影物镜系统。该物镜由一个旋转对称的折射透镜组和一个自由曲面反射镜组成。采用11.938 mm的数字微镜器件（DMD）作为空间光调制器产生图像源。采用法线加权迭代优化的方法计算自由曲面。最后，分析了系统的性能。仿真结果表明：超短焦投影物镜可在580 mm的投影距离处实现3 048 mm尺寸的大屏幕投影，系统的投射比低至0.19，系统的最大畸变小于0.72%。能够满足低投射比超短焦投影物镜的设计要求。该投影系统具有低投射比、低畸变、投影效果好等优点，可为超短焦投影系统的进一步发展提供有益参考。
- 光学系统设计 /
- 超短焦投影系统 /
- 自由曲面
Abstract: In order to design an ultra-short-focus objective lens with a low throw ratio, a system of ultra-short-focus, low-throw-ratio objective lenses is designed using a freeform surface and refractive-reflective optical structure. The objective lenses consist of a rotationally symmetrical refractive lens group and a freeform surface mirror. A 11.938 mm Digital Micromirror Device (DMD) is used as a spatial light modulator to generate the image source. The normal-weighted iterative optimization method is used to calculate the freeform surface. Finally, the performance of the system is analyzed. The simulation results show that the ultra-short-focus projection objective lens can achieve a 3 048 mm screen projection at a distance of 580 mm. The throw ratio of the system is 0.19, which is extraordinarily low, and the maximum distortion of the system is less than 0.72%. This can meet the design requirements of low throw ratio ultra-short-focus projection objective lenses. This projection system is advantageous for its low throw ratio, low distortion and good imaging quality, which can provide a useful reference for the further development of ultra-short-focus projection systems.
- optical system design /
- ultra-short-focus projection system /
- freeform surfaces

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Figure 1. Illustration of the principle of the design method

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Figure 2. Flowchart of the design method

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Figure 3. Surface sag of the entire FOV freeform surface

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Figure 4. Optical structure of the final projection system

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Figure 5. MTF curve of the final projection system

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Figure 6. Distortion grid of the final projection system

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Figure 7. RMS spot diagram of the final projection system

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Figure 8. Relative illumination of the whole FOV

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Table 1. Specifications of the ultra-short-focus projection system

Parameter	Specification
DMD size	11.938 mm(1 920×1 080)
Screen size	3 048 mm
Projection distance	580 mm
Throw ratio	0.19
Focal length	2.19 mm
FOV	156°
F number	1.7
Configuration	Refractive-reflective combined
Distortion	< 1%
MTF	>50%@0.363 lp/mm
Relative illumination	>90% at all FOVs

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