应用于空间惯性传感器的压电驱动器的性能测试

李华东; 齐克奇; 石强; 王少鑫; 王智

doi:10.3788/CO.20201302.0344

应用于空间惯性传感器的压电驱动器的性能测试

doi: 10.3788/CO.20201302.0344

cstr: 32171.14.CO.20201302.0344

李华东^{1, 2,},
齐克奇¹,
石强³,
王少鑫¹,
王智^1, ,

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
中国科学院大学, 北京 100049
3.
中国第一汽车股份有限公司新能源开发院, 吉林长春 130011

基金项目:

中国科学院"空间科学（二期）"战略性先导科技专项 XDA15020704

详细信息

作者简介:
李华东(1995—), 男, 山东潍坊人, 硕士研究生, 2017年于东北大学获得学士学位, 主要从事空间惯性传感器相关设计方面的研究。E-mail:356549686@qq.com

王智(1978—), 男, 山东寿光人, 博士, 研究员, 博士生导师, 2003年于长春理工大学获得硕士学位, 2006年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事空间引力波探测领域的研究。E-mail:wz070611@126.com

中图分类号: TH73;TH762
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出版历程
- 收稿日期: 2019-11-03
- 修回日期: 2019-12-09
- 刊出日期: 2020-04-01

Performance test of piezoelectric actuators for space inertial sensors

LI Hua-dong^{1, 2
,},
QI Ke-qi¹,
SHI Qiang³,
WANG Shao-xin¹,
WANG Zhi^{1
, ,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academic of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China
3.
New Energy Development Institute of China FAW Group Co., Ltd, Changchun 130011, China

Funds:

Leading Special Project of Chinese Academy of Sciences XDA15020704

More Information

Corresponding author: WANG Zhi, E-mail:wz070611@126.com

摘要

摘要: 为保证空间惯性传感器的正常在轨运行，在发射阶段需保证测试质量固定以避免与周围电容极板的接触碰撞；到达预定轨道后再重新捕获并以最小残余线速度将测试质量释放至精确位置，保持自由悬浮状态。测试质量的捕获定位对驱动器提出高精度的要求。本文针对在太空中捕获定位释放测试质量所用的压电直线驱动器进行了设计定制与性能测试。试验结果表明：该定制的压电驱动器最小步长小于1 nm，但步长稳定性误差较大；150 V工作电压条件最大驱动力达72 N；单步行进驱动力稳定；夹持测试质量过程中，驱动力稳定，稳定性偏差为0.16%。满足捕获、定位、释放机构的使用需求。
- 精密驱动 /
- 尺蠖运动 /
- 压电驱动器 /
- 驱动力 /
- 位移分辨率
Abstract: In order to ensure the normal operation of space inertial sensors in orbit, it is necessary to ensure the test mass is fixed during launch to prevent collision with the surrounding capacitor plate. It must grab the test mass after reaching its predetermined orbit and precisely release it in its correct position with minimal residual velocity such that it remains free-floating. In this paper, a piezoelectric linear actuator that is used to grab the test mass is designed, customized and tested for performance. The test results show that the customized piezoelectric actuator can achieve a minimum step size of less than 1 nm, but the step length stability error is large; the maximum driving force at 150 V of input is 72 N; the single stepping drive force is stable; during the process of fixing the test mass, the driving force is stable and the deviation in its stability is 0.16%. These findings meet the needs of the grabbing, positioning, and release mechanisms.
- precision actuation /
- inchworm motion /
- piezoelectric actuator /
- driving force /
- displacement resolution

HTML全文

图 1 应用尺蠖型压电直线驱动器的GPRM结构及捕获TM原理示意图

Figure 1. Structure of GPRM with inchworm-piezoelectric linear actuator and principle of grabbing TM

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图 2 驱动原理及压电堆叠封装示意图

Figure 2. Schematic diagram of driving principle and piezoelectric stack packaging

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图 3 压电单元驱动模式

Figure 3. Driving mode of piezo element

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图 4 压电直线驱动器结构图

Figure 4. Structure of piezoelectric linear actuator

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图 5 压电直线驱动器实物图

Figure 5. Prototype of piezoelectric linear actuator

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图 6 位移测量图

Figure 6. Displacement measurement system

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图 7 驱动力测量图

Figure 7. Driving force measurement system

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图 8 柔性片变形云图

Figure 8. Deformation nephogram of flexible sheet

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图 9 柔性片最大变形与受力关系曲线图

Figure 9. Relationship between maximum deformation and force for flexible sheet

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图 10 各驱动电压下步长测量曲线图

Figure 10. Measuring curves of step length under various driving voltages

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图 11 步长测量系统

Figure 11. Step length measurement system

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图 12 最大驱动力测试曲线

Figure 12. Testing curve of maximum driving force

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图 13 驱动力测试系统

Figure 13. Driving force testing system

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图 14 驱动力稳定性测试曲线

Figure 14. Testing curve of driving force stability

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表 1 柔性片不同受力条件下的最大变形及最大应力

Table 1. Maximum deformation and maximum stress of flexible sheet under different forces

序号	施力大小/N	最大变形/mm	最大应力/MPa
1	10	0.008 428	4.395 5
2	20	0.016 855	8.798 1
3	30	0.025 281	13.207
4	40	0.033 704	17.623
5	50	0.042 124	22.045
6	60	0.050 541	26.473
7	70	0.058 953	30.905
8	80	0.067 360	35.343
9	90	0.075 761	39.786
10	100	0.084 154	44.232

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表 2 驱动器不同电压下的平均步长

Table 2. Average step length of actuator at different voltages

序号	驱动电压/V	平均步长/nm
1	0.1	10.23
2	0.01	3.40
3	0.001	1.60
4	0.0002	0.85
5	0.0001	0.81

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表 3 不同电压下驱动器的步长稳定性偏差

Table 3. Step stability deviation of actuator under different driving voltages

序号	驱动电压/V	失稳系数/(%)
1	0.1	13.48
2	0.01	13.09
3	0.001	34.06
4	0.0002	58.68
5	0.0001	49.38

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