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靶丸内表面轮廓的白光共焦光谱测量技术

唐兴 王琦 马小军 高党忠 王宗伟 孟婕

唐兴, 王琦, 马小军, 高党忠, 王宗伟, 孟婕. 靶丸内表面轮廓的白光共焦光谱测量技术[J]. 中国光学, 2020, 13(2): 266-272. doi: 10.3788/CO.20201302.0266
引用本文: 唐兴, 王琦, 马小军, 高党忠, 王宗伟, 孟婕. 靶丸内表面轮廓的白光共焦光谱测量技术[J]. 中国光学, 2020, 13(2): 266-272. doi: 10.3788/CO.20201302.0266
TANG Xing, WANG Qi, MA Xiao-jun, GAO Dang-zhong, WANG Zong-wei, MENG Jie. Determination of the inner-surface profile of a capsule using chromatic confocal spectroscopy[J]. Chinese Optics, 2020, 13(2): 266-272. doi: 10.3788/CO.20201302.0266
Citation: TANG Xing, WANG Qi, MA Xiao-jun, GAO Dang-zhong, WANG Zong-wei, MENG Jie. Determination of the inner-surface profile of a capsule using chromatic confocal spectroscopy[J]. Chinese Optics, 2020, 13(2): 266-272. doi: 10.3788/CO.20201302.0266

靶丸内表面轮廓的白光共焦光谱测量技术

doi: 10.3788/CO.20201302.0266
基金项目: 

科学挑战计划 TZ2018006-0204-01

详细信息
    作者简介:

    唐兴(1980-), 男, 四川绵阳人, 学士, 助理研究员, 2004年于四川大学获得学士学位, 主要从事激光聚变靶参数测量技术研究。E-mail:4606794@qq.com

    马小军(1979-), 男, 四川南部人, 博士, 副研究员, 2003年于西安电子科技大学获得学士学位, 2013年于同济大学获得硕士学位, 2017年于复旦大学获得博士学位, 主要从事激光聚变靶参数测量技术研究。E-mail:maxj802@163.com

  • 中图分类号: O433.1

Determination of the inner-surface profile of a capsule using chromatic confocal spectroscopy

Funds: 

Science Challenge Program TZ2018006-0204-01

More Information
  • 摘要: 靶丸内表面轮廓是激光核聚变靶丸的关键参数,需要精密检测。本文首先分析了基于白光共焦光谱和精密气浮轴系的靶丸内表面轮廓测量基本原理,建立了靶丸内表面轮廓的白光共焦光谱测量方法。此外,搭建了靶丸内表面轮廓测量实验装置,建立了基于靶丸光学图像的辅助调心方法,实现了靶丸内表面轮廓的精密测量,获得了准确的靶丸内表面轮廓曲线;最后,对测量结果的可靠性进行了实验验证和不确定度分析,结果表明,白光共焦光谱能实现靶丸内表面低阶轮廓的精密测量,其测量不确定度优于0.1 μm。
  • 图  1  (a) 白光共焦光谱传感器的工作原理示意图和(b)透明样品下表面轮廓的测量原理

    Figure  1.  (a)Schematic of working principle of chromatic confocal spectroscopy and (b)measurement principle of the lower surface profile of capsule

    图  2  白光共焦光谱轮廓检测系统

    Figure  2.  Surface profile measurement system based on chromatic confocal spectrum

    图  3  靶丸旋转调心原理图

    Figure  3.  Principle diagram of adjusting rotation center of capsule

    图  4  靶丸内外表面轮廓的白光共焦光谱测量曲线

    Figure  4.  Chromatic confocal spectrum profile curves of the capsule inner and outer surfaces

    图  5  靶丸外表面轮廓(a)及其功率谱曲线(b)

    Figure  5.  Outer surface profile curves (a) and power spectra (b) of capsule

    图  6  正弦调制样品向上时的上表面轮廓测量数据(a)和校准前后的下表面轮廓数据(b)

    Figure  6.  The upper surface profile(a) and lower surface profiles before and after calibration (b)when the sinusoidal modulation structure is placed upward

    图  7  正弦调制样品向下时的上表面轮廓测量数据(a)和校准前后的下表面轮廓数据(b)

    Figure  7.  The upper surface profile (a) and lower surface profiles before and after calibration (b) when the sinusoidal modulation structure is placed downward

    表  1  测量不确定度分量表

    Table  1.   Components of measurement uncertainty

    不确定度分量 不确定度来源 不确定度大小/nm
    u1 直接测量误差 39
    u2 轴系的回转误差 44
    u3 重复性测量误差 41
    u4 校准模型误差 52
    下载: 导出CSV
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出版历程
  • 收稿日期:  2019-04-15
  • 修回日期:  2019-05-22
  • 刊出日期:  2020-04-01

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