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摘要: 为实现对大尺寸光学材料及系统元件的高精度对准测试，设计了一种新型Φ200 mm口径长焦距准直干涉测试装置。该装置以球面标准镜作为参考镜，结合斐索型透射式干涉机制和长焦距准直测试原理对凹球面大曲率半径光学元件进行面形精度检测，最大测试口径为Φ226.67 mm，且球面标准镜和球面标准反射镜同轴共球心，大幅度减小了测试空腔距离。结果表明，该系统空腔测试精度PV值为0.097λ@632.8 nm，RMS值为0.013λ@632.8 nm，系统重复稳定性优于λ/500@632.8 nm，可实现曲率半径为7 500~8 500 mm测试，且大曲率半径测试误差小于1/1 000。Abstract: In order to achieve high-precision alignment tests for large-size optical materials and system components, a new Φ200 mm long focal length collimation interference test device was designed. The device uses a spherical standard mirror as a reference mirror, combined with a phenotype transmissive interference mechanism and a long focal length collimation test principle to detect the surface accuracy of a concave spherical large curvature radius optical component. The maximum test aperture is Φ226.67 mm. The spherical standard mirror and spherical standard reflection mirror are coaxial with the center of the sphere, which greatly reduces the distance of the test cavity. The results show that the PV test accuracy of the system is λ/500@632.8 nm, and the radius of curvature test range is 7 500~8 500 mm with the test error of large curvature radius less than 1/1000.
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图 1 长焦距球面干涉装置光路示意图
Figure 1. Optical path schematic of the long focal length spherical interference device
图 2 Φ200 mm口径球面标准反射镜光学设计图像
Figure 2. Optical design of Φ200 mm spherical standard reflection mirror
图 3 632.8 nm波长下球面标准反射镜的波像差和spot图像
Figure 3. Wave aberration and spot results of the spherical standard reflection mirror at 632.8 nm
图 5 经典低速抛光加工下球面标准反射镜检测结果
Figure 5. Detection results of spherical standard reflection mirror in the classic low-speed polishing process
图 6 离子束抛光下球面标准反射镜检测结果
Figure 6. Detection results of spherical standard reflection mirror under ion beam polishing
图 7 经典低速抛光加工下球面标准镜检测结果
Figure 7. Detection results of spherical standard mirror in the classic low-speed polishing process
图 8 离子束抛光下球面标准镜检测结果
Figure 8. Detection results of spherical standard mirror under ion beam polishing
图 10 待测凹球面镜测试结果
Figure 10. Results of the concave spherical mirror measured by spherical interferometer test system
图 11 待测凹球面镜4D干涉仪测试结果
Figure 11. Results of the concave spherical mirror measured by 4D dynamic interferometer
图 12 Φ200 mm口径长焦距球面干涉测试装置
Figure 12. Φ200 mm long focal length spherical interference test device
表 1 系统空腔稳定性测试数据结果
Table 1. System cavity stability test results
序号 PV PEAK VALLY RMS 1 0.131 6 0.055 9 -0.075 7 0.017 6 2 0.098 4 0.041 8 -0.056 6 0.012 4 3 0.106 5 0.046 9 -0.059 6 0.012 5 4 0.099 3 0.052 2 -0.047 1 0.01 3 5 0.104 0.052 8 -0.051 2 0.013 8 6 0.097 3 0.051 -0.046 2 0.012 8 7 0.097 2 0.045 4 -0.051 8 0.013 1 8 0.097 6 0.051 5 -0.046 2 0.011 6 9 0.105 2 0.048 5 -0.056 8 0.013 7 10 0.105 2 0.052 5 -0.052 7 0.013 5 11 0.096 1 0.046 5 -0.049 5 0.013 12 0.094 3 0.042 6 -0.051 7 0.013 8 13 0.105 5 0.046 9 -0.068 6 0.013 2 14 0.176 6 0.061 5 -0.099 2 0.019 6 15 0.174 1 0.038 1 -0.042 1 0.014 1 16 0.088 7 0.083 3 -0.098 6 0.011 5 最大值 0.176 6 0.083 3 -0.042 1 0.019 6 最小值 0.088 7 0.038 1 -0.099 2 0.011 5 平均值 0.111 1 0.015 4 -0.059 6 0.013 7 RMS 0.015 6 0.007 5 0.010 2 0.001 8 
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