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板条激光器光束质量控制技术研究进展

闫钰锋 于洋 白素平 倪小龙 张晖 于信

闫钰锋, 于洋, 白素平, 倪小龙, 张晖, 于信. 板条激光器光束质量控制技术研究进展[J]. 中国光学(中英文), 2019, 12(4): 767-782. doi: 10.3788/CO.20191204.0767
引用本文: 闫钰锋, 于洋, 白素平, 倪小龙, 张晖, 于信. 板条激光器光束质量控制技术研究进展[J]. 中国光学(中英文), 2019, 12(4): 767-782. doi: 10.3788/CO.20191204.0767
YAN Yu-feng, YU Yang, BAI Su-ping, NI Xiao-long, ZHANG Hui, YU Xin. Progress on beam quality control technology of slab lasers[J]. Chinese Optics, 2019, 12(4): 767-782. doi: 10.3788/CO.20191204.0767
Citation: YAN Yu-feng, YU Yang, BAI Su-ping, NI Xiao-long, ZHANG Hui, YU Xin. Progress on beam quality control technology of slab lasers[J]. Chinese Optics, 2019, 12(4): 767-782. doi: 10.3788/CO.20191204.0767

板条激光器光束质量控制技术研究进展

基金项目: 

吉林省科技厅重点科技研发项目 20180201016GX

详细信息
    作者简介:

    闫钰锋(1978—),男,吉林长春人,博士,副教授,博士生导师,主要从事精密仪器设计及光电检测方面的研究。E-mail:yanyufeng_cust@126.com

    于信(1988—),男,吉林四平人,博士,讲师,主要从事像差检测、校正及精密仪器设计方面的研究。E-mail:41213100@qq.com

  • 中图分类号: TN248.1

Progress on beam quality control technology of slab lasers

Funds: 

Key Science and Technology R&D Project of Jilin Provincial Science and Technology Department 20180201016GX

More Information
  • 摘要: 随着激光二极管技术的发展,以及一些先进热管理方案和新型加工工艺的涌现,固体激光器的输出功率已达到百千瓦量级,而光束质量的控制问题却日益凸显。本文归纳了板条激光器的光束质量控制技术,对当前已经实现了的几种技术路线进行了深入细致的分析,包括静态相位校正技术、非线性光学校正技术、自适应光学校正技术、几何光学校正技术等,并分别介绍了其工作原理、研究进展以及优缺点。

     

  • 图 1  静态相位校正工作原理示意图

    Figure 1.  Principle schematic of static phase corrector

    图 2  像差补偿前(a)和像差补偿后(b)的远场光斑图

    Figure 2.  Profiles at the Fourier plane without(a) and with(b) phase correction

    图 3  “之”字形板条激光器原理示意图

    Figure 3.  Schematic diagram of the zigzag-type slab laser

    图 4  MOPA结构示意图

    Figure 4.  Structural schematic of the MOPA

    图 5  互易式自校正谐振腔原理示意图

    Figure 5.  Schematic diagram of reciprocal self-correcting resonator

    图 6  非互异性自校正谐振腔示意图

    Figure 6.  Schematic of nonreciprocal resonator with self-correcting

    图 7  自适应光学校正技术原理示意图

    Figure 7.  Schematic of AO system

    图 8  诺·格公司百千瓦相干合成实验原理图

    Figure 8.  Schematic of the 100kW coherently combined laser system

    图 9  无波前探测AO像差校正的实验原理图

    Figure 9.  Schematic of the wave-front sensor-less AO system

    图 10  腔内像差补偿系统原理图

    Figure 10.  Principle diagram of intracavity aberration compensation system

    图 11  离轴三反像差校正系统实验原理图

    Figure 11.  Principle diagram of offaxis tri-inversion aberration correction sytsem

    图 12  MOPA激光器混合式像差校正系统示意图

    Figure 12.  Schematic of the hybrid AO syetem for the MOPA laser

    图 13  混合式像差校正系统.

    Figure 13.  Schematic of the hybrid AO syetem

    表  1  AO系统进行像差校正的代表性成果

    Table  1.   Representative results of aberration correction used by AO system

    年份 单位 功率 光束质量
    2007 诺·格公司 15 kW(平均) 1.28×DL
    2009 诺·格公司 100 kW(平均) 2.9×DL
    2012 中科院光电所 265 W(平均) 6.2×DL(β)
    2013 国防科技大学 11.3 kW(平均) 4.06×DL(β)
    2015 中科院理化所 8.2 kW(平均) 3.5×DL(β)
    2018 中科院光电所 750 MW(峰值) 1.64×DL(β)
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  • 收稿日期:  2019-03-05
  • 修回日期:  2019-04-11
  • 刊出日期:  2019-08-01

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