X射线散射法测量Wolter-Ⅰ型掠入射望远镜的表面粗糙度

张亚超; 刘鹏; 王晓光; 何玲平; 陈波

doi:10.3788/CO.20191203.0587

X射线散射法测量Wolter-Ⅰ型掠入射望远镜的表面粗糙度

张亚超^{1, 2,},
刘鹏^{1, 2},
王晓光¹,
何玲平¹,
陈波^1, ,

1.
中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
2.
中国科学院大学, 北京, 100049

基金项目:

国家自然科学基金资助项目 U1631117

详细信息

中图分类号: O434
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出版历程
- 收稿日期: 2018-05-18
- 修回日期: 2018-06-12
- 刊出日期: 2019-06-01

Characterizing curved surface roughness of Wolter-Ⅰ X-ray grazing incidence telescope

doi: 10.3788/CO.20191203.0587

ZHANG Ya-chao^{1, 2
,},
LIU Peng^{1, 2},
WANG Xiao-guang¹,
HE Ling-ping¹,
CHEN Bo^{1
, ,}

1.
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds:

National Natural Science Foundation of China U1631117

More Information

Author Bio:
ZHANG Ya-chao(1989—), is a Ph.D. student at Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. His current research interests include the calibration of X-ray optical system. E-mail:zyc198902@126.com

CHEN Bo(1961—), is a professor in the Chinese Academy of Sciences. He received his Ph.D. degree from Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences in 2003. His current research interests include soft X-ray and extreme ultraviolet sources, radiation metrology and optical space instruments. E-mail:chenb@ciomp.ac.cn

Corresponding author: CHEN Bo, E-mail:chenb@ciomp.ac.cn

摘要

摘要: 研究X射线散射法在软X射线掠入射望远镜反射镜的表面粗糙度测量中的应用。首先，在光滑表面近似和细光束条件下，根据Harvey-Shack表面散射理论得出反射镜的面形仅影响总反射光分布中的镜向部分，对散射部分的影响可以忽略不计；然后设计了X射线散射法测量Wolter-Ⅰ型软X射线掠入射望远镜的表面粗糙度的实验方案，并且对引起系统误差的主要因素进行了分析，确定了进行仿真实验时的参数；最后用Zemax对实验方案进行了仿真。在空间频率高于28/mm时，表面粗糙度的仿真测量结果与真值吻合得非常好。本文研究结果显示：在光滑表面近似和细光束条件下，反射镜的面形仅影响表面粗糙度的低频部分的测量准确性，对高频部分测量准确性的影响可以忽略不计，利用X射线散射法可以准确测量软X射线掠入射望远镜的表面粗糙度。
- 表面散射 /
- 粗糙度 /
- 功率谱密度 /
- 掠入射望远镜
Abstract: The X-ray scattering method is investigated in application of characterizing surface roughness of X-ray grazing incidence telescope. The surface figure effect on the scattering diagram of the curved rough mirror is analyzed in detail based on generalized Harvey-Shack surface scatter theory and image formation theory, when smooth-surface approximation is met and the width of the incident beam is about one tenth of spatial wavelength of the surface figure. Based on the analysis, the characterizing scheme is designed and the determination error of the one-dimensional power spectral density function due to the finite width of the receiving slit before the detector is discussed. The scheme is simulated with Zemax and the simulated results verify that the surface figure only affects the measuring accuracy of the low-spatial-frequency surface roughness. The method overcomes difficulty in measuring roughness of the grazing incidence mirror with high resolution conveniently during the development of the X-ray grazing incidence telescope.
- surface scatter /
- roughness /
- power spectral density /
- grazing incidence telescope

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Figure 1. Schematic diagram of X-rays reflected by a rough surface. θ_i is the grazing incidence angle and θ and φ are the scattering grazing and azimuth angles, respectively

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Figure 2. Schematic diagram for surface roughness characterization

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Figure 3. Error of PSD-function determination caused by the finite width of a receiving slit

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Figure 4. Error of PSD-function determination η_s for different widths of the receiving slits S=50 μm, 100 μm, 200 μm. Calculations are performed at an incident wavelength of λ=4.47 nm, a primary beam grazing incident angle of θ₀=5.24° and a sample-detector distance of D=336 mm

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Figure 5. (a) Scattering diagram, (b)surface figure effect, (c)scattered component of the scattering diagram, (d)analysis of the surface figure effect on the scattering diagram

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Figure 6. PSD data extracted from the scattering diagram and its real value

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Table 1. Specifications of solar soft X-ray grazing incidence telescope in our lab

Parameter	Telescope	Paraboloid	Hyperboloid
Nodal focal length/mm	659.885 495
Optic length/mm		47.5	47.5
Gap about joint/mm	5
Vertex radius/mm		-2.431 457 33	-2.440 466 51
Inner radius r_inner/mm		80.075 946 99	75.414 332 72
Outer radius r_outer/mm		81.505 495 11	79.771 451 35
Conic constant ε²		-1	-1.007 424 25
Location of focus/mm		1 364.867 410 92	705

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参考文献(15)

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