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摘要: 光学微透镜阵列在光学系统中的应用广泛，需求量大，而玻璃模压成形技术是最高效的微透镜阵列量产加工方法，具有精度高，一致性好，生产成本低等特点，有重要的应用研究价值。本文介绍了光学微透镜阵列的设计原理，模具制造技术，模压成形技术及相应检测技术；重点介绍了微透镜阵列模压成形试验与有限元仿真研究的最新进展；最后对微透镜模压成形发展前景进行了展望，包括微透镜阵列模压材料，模具表面镀层技术及超声复合加工技术在微透镜阵列模压成形中的应用等。Abstract: The optical microlens array is widely used in the optical system with high demand. The glass molding technology is the most efficient methods of mass production and processing of microlens array with characteristics of high precision, good consistency and low production cost, which has important application and research value. In this paper, the design principle of optical microlens array, as well as mold manufacturing technology, glass molding technology and the corresponding detection technology is introduced. The latest development of microlens array molding test and FEM simulation are mainly discussed. The development of microlens molding, including the material for microlens array molding, the mold surface coating technology, and the application of ultrasonic composite processing technology in the microlens array molding is prospected at the end of this paper.
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图 2 (a) SYS PFLF7-60A玻璃模压成形机；(b)设备原理图
Figure 2. (a)Photograph of the SYS PFLF7-60A glass molding machine; (b)Schematic diagram of the machine
图 7 (a)Talysurf (T/H)轮廓仪；(b)Panasonic UA3P三维立体测量仪
Figure 7. (a)Talysurf(T/H) profiler; (b)Panasonic UA3P three dimensional measuring instrument
图 8 (a)奥林巴斯LEXT OLS4100共聚焦显微镜；(b)泰勒霍普森Talysurf CCI白光干涉仪
Figure 8. (a)OLYMPUS LEXT OLS4100 confocal microscope; (b)Taylor Hobson Talysurf CCI
图 9 测量模压前后模具面形精度变化
Figure 9. Change of mould surface shape accuracy before and after measuring mould pressing
图 13 (a)氧化石墨烯磷化镍GO-Ni-P镀层；(b)镀层XRD分析结果
Figure 13. (a)GO-Ni-P coating; (b)XRD analysis of GO-Ni-P coating
图 15 成形不同振动时刻预形体底面与模具相对位置
Figure 15. Vertical displacement of mold and the preform's bottom surface at different vibration moment in shaping
属性 L-BAL35(OharaInc) K-PG325(SUMITA Optical Glass, Inc) 转变温度Tg/℃ 527 288 屈服温度At/℃ 567 317 软化温度SP/℃ 619 325 热膨胀系数α(×10-6/℃) 6.6(-30~70 ℃) 14.3(-30~70 ℃) 8.1(100~300 ℃) 16.5(50~200 ℃) 传导率k(W/(m·K)) 1.126 0.748 弹性模量E(×109N/m2) 100.8 64.2 泊松比v 0.247 0.265 
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表 2 碳化钨材料的物理参数
Table 2. Properties of Tungsten carbide
化学式 WC 摩尔质量/(g·mol-1) 195.85 外观 Grey-black lustrous solid 密度/(g·cm3) 15.6 熔点/℃ 2 785~2 830 沸点/℃(at 0.101 3 MPa) 6 000
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