光学自由曲面面形检测技术

张磊; 刘东; 师途; 杨甬英; 李劲松; 俞本立

doi:10.3788/CO.20171003.0283

光学自由曲面面形检测技术

doi: 10.3788/CO.20171003.0283

张磊^1, ,,
刘东²,
师途²,
杨甬英²,
李劲松¹,
俞本立¹

1.
安徽大学光电信息获取与控制教育部重点实验室, 安徽合肥 230601
2.
浙江大学现代光学仪器国家重点实验室, 浙江杭州 310027

基金项目:

国家自然科学基金资助项目 61675005

国家自然科学基金资助项目 61440010

安徽省自然科学基金资助项目 1508085MF118

安徽省科技攻关项目 1501041136

国家重点研发专项 2016YFC0302202

安徽大学博士科研启动项目 J01003208

详细信息

作者简介:
张磊(1987-), 男, 安徽舒城人, 博士, 讲师, 主要从事非球面和自由曲面检测、干涉仪研制及应用、光学设计等方面的研究。E-mail:optzl@ahu.edu.cn

通讯作者:
张磊, E-mail:optzl@ahu.edu.cn

中图分类号: TQ171.65;TN247;TH741
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- 被引次数: 0
出版历程
- 收稿日期: 2017-01-24
- 修回日期: 2017-03-01
- 刊出日期: 2017-06-01

Optical free-form surfaces testing technologies

1.
Key Laboratory of Opto-electronic information Acquisition and Manipulation Ministry of Education, Anhui University, Hefei 230601, China
2.
State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China

Funds:

National Natural Science Foundation of China 61675005

National Natural Science Foundation of China 61440010

Anhui Natural Science Foundation 1508085MF118

Science and Technology Key Project of Anhui Province 1501041136

National Key Research and Development Projects 2016YFC0302202

The Doctoral Start-up Foundation of Anhui University J01003208

摘要

摘要: 光学自由曲面因其表面自由度较大，可以针对性地提供或矫正不同的轴上或轴外像差，同时满足现代光学系统高性能、轻量化和微型化的要求，逐渐成为现代光学工程领域的热点。自由曲面的检测技术已经成为制约其应用的最重要因素，而目前精密光学自由曲面的检测手段仍然沿用非球面检测方法。本文回顾了近年来的自由曲面检测发展历程，对目前主流的非接触式检测方法（微透镜阵列法，结构光三维检测法，相干层析术，干涉检测法）进行了重点介绍；总结了非球面检测方法运用到自由曲面检测中的技术难点，同时结合这些技术难点，展望了自由曲面检测的未来发展新趋势，主要集中在非旋转对称像差的动态补偿、分区域像差的回程误差校准及子孔径拼接技术。
- 自由曲面检测 /
- 干涉检测法 /
- 子孔径拼接 /
- 非旋转对称像差补偿
Abstract: With great degrees of freedom, optical free form surfaces would provide the axial aberrations and off axis ones. Meanwhile, they meet requirements of modern optical systems in high-performance, light weight and micromation, and gradually becomes the hot topic in modern optical engineering. However, their applications have been limited by testing technology of optical free form surface. Most testing methods are still follow those of aspheric surfaces yet. In this paper, we introduce the mathematic description, fabrication and testing of free-form surfaces, especially focusing on several non-contact metrology, such as micro-lenses methods, 3D test with structured light, coherence tomography and interferometry. The technique difficult and development tendency stressing on flexible compensation for rotationally asymmetric aberration and subaperture stitching based on retrace error correction of the regional aberration are introduced as well.
- free-form surface testing /
- interferometry /
- subaperture stitching /
- rotationally asymmetric aberration compensation

HTML全文

图 1 夏克-哈特曼传感法检测自由曲面原理

Figure 1. Principle of Shark-Hartmann wavefront sensor in free-form surface test

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图 2 夏克-哈特曼传感的检测限制

Figure 2. Testing limitation of Shark-Hartmann wavefront sensor

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图 3 面结构光三维检测基本原理

Figure 3. Principle of surface structured light 3D measurement

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图 4 美国Catholic大学条纹投影技术设备

Figure 4. Device of fringe projection in Catholic university

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图 5 条纹反射设备

Figure 5. Devices of fringe reflection

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图 6 SS-OCT系统原理

Figure 6. Principle diagram of SS-OCT system

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图 7 计算全息法检测非球面原理

Figure 7. Principle of aspheric surfaces metrology by CGH

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图 8 典型CGH示意图

Figure 8. Examples of CGH

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图 9 部分零位干涉检测原理

Figure 9. Principle of partial null interferometry

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图 10 部分零位干涉检测的干涉图畸变

Figure 10. Distortion of interferograms in the partial null interferometry

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图 11 TWI原理与设备

Figure 11. Principle and device of TWI

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图 12 QED公司CSSI设备原理

Figure 12. CSSI device of QED

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图 13 可变零位器及其对子孔径干涉图的影响

Figure 13. VON and the subaperture interferograms

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图 14 ASSI原理

Figure 14. ASSI principle

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图 15 VON可提供的像差补偿

Figure 15. Aberrations compensation of VON

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图 16 反向旋转的Zernike面板示意图

Figure 16. Schematic diagram of counter-rotating Zernike plates

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图 17 非常规子孔径

Figure 17. Irregular subapertures

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