纳米级面形精度光学平面镜加工

张峰

doi:10.3788/CO.20140704.0616

纳米级面形精度光学平面镜加工

doi: 10.3788/CO.20140704.0616

张峰^,

中国科学院长春光学精密机械与物理研究所光学系统先进制造技术中国科学院重点实验室, 吉林长春 130033

基金项目:

国家自然科学基金资助项目（No.61210015）

详细信息

作者简介:
张峰（1969-），男，吉林省吉林市人，博士，研究员，博士生导师，1991年、1997年于长春理工大学(原长春光学精密机械学院)分别获得学士、硕士学位，2000年于中国科学院长春光学精密机械与物理研究所获得博士学位，主要从事先进光学制造技术方面的研究。E-mail：zhangfjyz@sina.cn

通讯作者:
张峰

中图分类号: O439
计量
- 文章访问数: 2295
- HTML全文浏览量: 770
- PDF下载量: 615
- 被引次数: 0
出版历程
- 收稿日期: 2014-02-17
- 修回日期: 2014-04-23
- 刊出日期: 2014-07-25

Fabrication of optical flat mirror with nanometer surface error

ZHANG Feng^,

Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

摘要

摘要: 为实现纳米级面形精度光学平面镜的高效精密抛光，提出了一种由传统环带抛光技术和先进离子束抛光技术相结合的组合式加工方法。介绍了环带抛光技术和离子束抛光技术的原理，通过实验研究了离子束抛光的材料去除函数，并采用这种组合抛光方法对口径为150 mm的平面镜进行抛光，抛光后平面镜的面形误差和表面粗糙度分别达到1.217 nm RMS和0.506 nm RMS。实验结果表明，这种组合抛光技术适合纳米级面形精度光学平面镜的加工。
- 光学加工 /
- 环带抛光 /
- 离子束抛光 /
- 材料去除函数
Abstract: In order to polish optical flat mirror with nanometer surface error efficiently, a consisting of new polishing technology traditional continuous polishing(CP) and advanced ion beam figuring(IBF) is presented in this paper. The polishing principles of CP and IBF are introduced. The polishing experiment and material removal function of IBF are studied. A Ф150 mm optical flat mirror is polished by the combined polishing technology. After polishing, the surface error and roughness of the flat mirror are 1.217 nm RMS and 0.506 nm RMS, respectively. The experiment results indicate that the combined polishing technology is effective for polishing optical flat mirror with nanometer surface error.
- optical fabrication /
- continuous polishing(CP) /
- ion beam figuring(IBF) /
- material removal function

HTML全文

参考文献(1)

[1] 宣斌,谢京江,宋淑梅. 多模式组合抛光技术在光学加工中的应用[J]. 光学精密工程,2011,19(1):41-50. XUAN B,XIE J J,SONG SH M. Application of multi-mode combined polishing to optical manufacturing[J]. Opt. Precision Eng.,2011,19(1):41-50.(in Chinese)
[2] 张峰. 空间相机碳化硅反射镜表面硅改性层的组合式抛光[J]. 中国激光,2013,40(7):0716001-1-0716001-5. ZHANG F. Combined type polishing of silicon modification layer on silicon carbide mirror for space camera[J]. Chinese J. Lasers,2013,40(7):0716001-1-0716001-5.(in Chinese)
[3] 刘振宇,罗霄,邓伟杰,等. 大口径非球面的组合加工[J]. 光学精密工程,2013,21(11):2791-2797. LIU ZH Y,LUO X,DENG W J,et al.. Multi-mode optimization for large optical aspheric mirror[J]. Opt. Precision Eng.,2013,21(11):2791-2797.(in Chinese)
[4] JONES R A. Optimization of computer controlled polishing[J]. Applied Optics,1977,6(1):1247-1249.
[5] 张健,代雷,王飞,等. 小磨头自适应抛光抑制高精度非球面中频误差[J]. 光学学报,2013,33(8):0822002-1-0822002-7. ZHANG J,DAI L,WANG F,et al. Restraint of mid-spatial-frequency error aspheric surface by small-tool adaptive polishing[J]. Acta Optica Sinica,2013,33(8):0822002-1-0822002-7.(in Chinese)
[6] 范斌,万勇建,陈伟,等. 能动磨盘加工与数控加工特性分析[J]. 中国激光,2006,33(1):128-132. FAN B,WAN Y J,CHEN W,et al.. Manufacturing features comparing between computer control active-lap and computer control optical surface for large aspheric optics[J]. Chinese J. Laser,2006,33(1):128-132.(in Chinese)
[7] 尹韶辉,徐志强,陈逢军,等. 小口径非球面斜轴磁流变抛光技术[J]. 机械工程学报,2013,49(17):33-38. YIN SH H,XU ZH Q,CHEN F J,et al.. Inclined axis magnetorheological finishing technology for small aspherical surface[J]. J. Mechanical Eng.,2013,49(17):33-38.(in Chinese)
[8] 武建芬,卢振武,张红鑫,等. 光学非球面离子束加工模型及误差控制[J]. 光学精密工程,2009,2(5):414-420. WU J F,LU ZH W,ZHANG H X,et al.. Model of ion beam figuring in aspheric optics and its error control[J]. Opt. Precision Eng.,2009,17(11):2678-2683.(inChinese)
[9] DAI Y F,LIAO W L,ZHOU L,et al.. Ion beam figuring of high-slope surfaces based on figure error compensation algorithm[J]. Applied Optics,2010,49(34):6630-6636.
[10] DEMMLER M,ZEUNER M,LUCA A,et al.. Ion beam figuring of silicon aspheres[J]. SPIE,2011,7934:793416-1-793416-6.
[11] 刘民才,胡晓阳,李壮声. 大口径高精度方形平面光学元部件的研制[J]. 光学技术,2001,27(6):518-521. LIU M C,HU X Y,LI ZH SH. Research of fabricating large quadrate high-precision plane optical elements[J]. Optical Technique,2001,27(6):518-521.(in Chinese)
[12] 曹冲. 大口径光学元件超精密环抛技术研究[D].成都:四川大学,2004. CAO CH. Study on ultra-precision continuous polishing of large aperture optical components[R]. Chengdu:Sichuan University,2004.(in Chinese)
[13] 李俊峰,陈亚,宣斌. 环带抛光技术材料去除理论模型研究[J]. 中国光学与应用光学,2009,2(5):414-420. LI J F,CHEN Y,XUAN B,et al.. Study on material removal theoretical model of zone polishing technology[J]. Chinese J. Opt. Appl. Opt.,2009,2(5):414-420.(in Chinese)
[14] 马志成. 大口径平面光学元件加工方法研究[D].长春:中国科学院长春光学精密机械与物理研究所,2010. MA ZH CH. The study on the methods of fabrication a large aperture flat[R]. Changchun:Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,2010.(in Chinese)
[15] 邓伟杰,郑立功,史亚莉. 基于线性代数和正则化方法的驻留时间算法[J]. 光学精密工程,2007,7(7):1009-1015. DENG W J,ZHENG L G,SHI Y L. Dwell time algorithm based on matrix algebra and regularization method[J]. Opt. Precision Eng.,2007,7(7):1009-1015.
[16] 舒谊,周林,谢旭辉,等. 离子束倾斜入射抛光对表面粗糙度的影响[J]. 纳米技术与精密工程,2012,10(4):365-368. SHU Y,ZHOU L,XIE X H,et al.. Impact of oblique incidence in ion beam figuring on surface roughness[J]. Nanotechnology and Precision Engineering,2012,10(4):365-368.(in Chinese)