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表面改性碳化硅基底反射镜加工技术现状

康健 宣斌 谢京江

康健, 宣斌, 谢京江. 表面改性碳化硅基底反射镜加工技术现状[J]. 中国光学(中英文), 2013, 6(6): 824-833. doi: 10.3788/CO.20130606.824
引用本文: 康健, 宣斌, 谢京江. 表面改性碳化硅基底反射镜加工技术现状[J]. 中国光学(中英文), 2013, 6(6): 824-833. doi: 10.3788/CO.20130606.824
KANG Jian, XUAN Bin, XIE Jing-jiang. Manufacture technology status of surface modified silicon carbide mirrors[J]. Chinese Optics, 2013, 6(6): 824-833. doi: 10.3788/CO.20130606.824
Citation: KANG Jian, XUAN Bin, XIE Jing-jiang. Manufacture technology status of surface modified silicon carbide mirrors[J]. Chinese Optics, 2013, 6(6): 824-833. doi: 10.3788/CO.20130606.824

表面改性碳化硅基底反射镜加工技术现状

基金项目: 

国家高技术研究发展计划(863计划)资助项目

详细信息
    作者简介:

    康健(1984-),男,吉林长春人,硕士研究生,2007年于长春理工大学获得学士学位,主要从事大口径非球面加工及检测方面的研究。E-mail:kangjian0116@hotmail.com

    通讯作者:

    谢京江

  • 中图分类号: TH706;TN304.24

Manufacture technology status of surface modified silicon carbide mirrors

  • 摘要: 针对表面改性SiC基底反射镜在空间光学系统中的应用,总结了该类反射镜在国内外的研究现状。概括了碳化硅基底反射镜的发展趋势。介绍了常用的碳化硅材料,分析了它们的性质。给出了几种常用的碳化硅镜坯制备工艺,包括成型、改性和不同的抛光技术。通过对国内现有加工工艺和改性技术的分析,总结出了适应我国的表面改性碳化硅反射镜加工的发展方向。

     

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  • 收稿日期:  2013-10-10
  • 修回日期:  2013-11-15
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