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并行共焦测量中的并行光源技术综述

余卿 余晓芬 崔长彩 叶瑞芳 范伟

余卿, 余晓芬, 崔长彩, 叶瑞芳, 范伟. 并行共焦测量中的并行光源技术综述[J]. 中国光学(中英文), 2013, 6(5): 652-659. doi: 10.3788/CO.20130605.0652
引用本文: 余卿, 余晓芬, 崔长彩, 叶瑞芳, 范伟. 并行共焦测量中的并行光源技术综述[J]. 中国光学(中英文), 2013, 6(5): 652-659. doi: 10.3788/CO.20130605.0652
YU Qing, YU Xiao-fen, CUI Chang-cai, YE Rui-fang, FAN Wei. Survey of parallel light source technology in parallel confocal measurement[J]. Chinese Optics, 2013, 6(5): 652-659. doi: 10.3788/CO.20130605.0652
Citation: YU Qing, YU Xiao-fen, CUI Chang-cai, YE Rui-fang, FAN Wei. Survey of parallel light source technology in parallel confocal measurement[J]. Chinese Optics, 2013, 6(5): 652-659. doi: 10.3788/CO.20130605.0652

并行共焦测量中的并行光源技术综述

doi: 10.3788/CO.20130605.0652
基金项目: 

国家自然科学基金资助项目(No.50775063);教育部新世纪优秀人才支持计划资助项目(No. NCET-10-0116);华侨大学高层次人才科研启动费资助项目(No.12BS109)

详细信息
    作者简介:

    余卿(1983-),男,江西新余人,博士,讲师,2005年、2011年于合肥工业大学分别获得学士、博士学位,主要从事光电检测、精密机械设计等方面的研究,E-mail:jorson.y@163.com

    通讯作者:

    余卿

  • 中图分类号: TH742.9

Survey of parallel light source technology in parallel confocal measurement

  • 摘要: 并行共焦测量技术的核心是将单点共焦测量变成多点同时扫描测量,从而使共焦测量速度显著提高。本文介绍了共焦测量技术原理,综述了用于并行共焦的并行光源技术,分析了这些方法的优点和不足。结合作者近年来的研究成果,重点阐述了基于微透镜阵列和数字微镜器件(DMD)产生并行光源的新方法。分析和研究了DMD的空间光调制机理,最终建立了一种单光源双光路并行像散共焦测量系统。

     

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出版历程
  • 收稿日期:  2013-07-11
  • 修回日期:  2013-09-13
  • 刊出日期:  2013-10-10

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