高精度电光调制椭偏应力传感系统

陈敏; 理智; 刘巍; 牛宇; 罗子人

doi:10.37188/CO.2023-0222

高精度电光调制椭偏应力传感系统

doi: 10.37188/CO.2023-0222

cstr: 32171.14.CO.2023-0222

陈敏^1,,
理智^2,,
刘巍^2, ,,
牛宇^3, ,,
罗子人^2,

1.
中冶赛迪信息技术有限公司, 重庆 401329
2.
中国科学院力学研究所, 北京 100190
3.
国科大杭州高等研究院基础物理与数学科学学院, 杭州 310024

基金项目: 国家重点研发计划资助（No. 2020YFC2200104，No. 2021YFC220290）

详细信息

作者简介:
陈　敏（1979—），男，四川宜宾人，硕士，高级工程师，上海交通大学固体力学专业，主要从事多领域耦合系统的联合仿真。E-mail：min.chen@cisdi.com.cn

刘　巍（1983—），男，湖北武汉人，博士，助理研究员，中国科学院力学所一般力学专业，主要从事椭偏传感技术。E-mail：liuwei@imech.ac.cn

牛宇（1983—），男，北京人，博士，研究员，2011年于中国科学院力学研究所获得博士学位，主要从事光学精密测量方面的研究。E-mail：niuyu@ucas.ac.cn

中图分类号: TP394.1; TH691.9
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- 被引次数: 0
出版历程
- 收稿日期: 2023-12-12
- 录用日期: 2024-02-06
- 网络出版日期: 2025-01-22

High-precision electro-optic modulated ellipsometric stress sensing system

CHEN Min^1
,,
LI Zhi^2
,,
LIU Wei^{2
, ,},
NIU Yu^{3
, ,},
LUO Zi-ren^2
,

1.
CISDI Information Technology Co., LTD. Chongqing 401329, China
2.
Institute of Mechanics, Chinese Academy of Sciences, Beijing 100190, China
3.
School of Fundamental Physics and Mathematical Sciences, Hangzhou Institute for Advanced Study, UCAS, Hangzhou 310024, China

Funds: Supported by the National Key Research and Development Program (No. 2020YFC2200104, No. 2021YFC220290)

More Information

Corresponding author: liuwei@imech.ac.cn; niuyu@ucas.ac.cn

摘要

摘要:
为了实现精密制造中关键部件残余应力的高精度检测，建立了电光调制椭偏应力传感系统，并对工程中常见的304不锈钢材料在单轴拉伸应力条件下的椭偏信号响应进行了研究。首先，基于反射椭偏的基本原理，建立了不同光轴方向上椭偏信号与单轴拉伸金属试样寻常折射率和异常折射率的关系。其次，针对不锈钢材料，优化了椭偏应力传感的工作点。通过对比消光点和非零线性工作点的椭偏信号，证明了非零线性条件适用于应力信号的传感。最后，对不同光轴方向下，由应力引起的椭偏信号进行测量。实验结果表明：针对304不锈钢，系统的最低应力检测限为7.84 kPa，系统的应力检测精度优于7.84 kPa。该系统可用于精密制造中，满足金属工件高精度应力检测的要求。
- 光弹性 /
- 应力双折射 /
- 椭偏 /
- 残余应力 /
- 电光调制
Abstract:
To achieve high-precision residual stress detection in key components in precision manufacturing, an electro-optic modulatied ellipsometric stress sensing stress has been established. This study focused on the ellipsometric signal response of common 304 stainless-steel materials in engineering under uniaxial tensile stress conditions. Firstly, based on the fundamental principles of reflection ellipsometry, the relationship between the ellipsometric signal and the ordinary and extraordinary refractive indices was established for different optical axis directions. Secondly, the working point of ellipsometric stress sensing was optimized for stainless steel materials. By comparing the ellipsometric signals at the extinction point and the non-zero linear working point, it was demonstrated that the non-zero linear condition is suitable for stress signal sensing. Finally, the stress-induced ellipsometric signals were measured under different optical axis directions. The experimental results indicate that for 304 stainless steel, the system's minimum stress detection limit is 7.84 kPa, and the stress detection accuracy of the system is better than 7.84 kPa. This system can be utilized for high-precision stress detection requirements in metal workpieces in precision manufacturing.
- photoelasticity /
- stress birefringence /
- ellipsometry /
- residual stress /
- electro-optic modulation

HTML全文

图 1 高精度电光调制的椭偏应力系统

Figure 1. High-precision electro-optic modulated ellipsometric stress sensing system

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图 2 应力加载装置

Figure 2. Stress-loading device

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图 3 应力检测示意图

Figure 3. Schematic diagram of stress detection

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图 4 不同入射角条件下不锈钢的椭偏参数幅值及相位$ ? $

Figure 4. Ellipsometric amplitude and phase $ \Delta $ of stainless steel at different angles of incidence

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图 5 消光点附近的椭偏信号。（a）椭偏时域信号；（b）对应频域信号

Figure 5. Ellipsometric signal in the proximity of the extinction points. (a) Signal in the time domain; (b) corresponding signal in the frequency domain

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图 6 非零线性工作点附近的椭偏信号。（a）椭偏时域信号；（b）对应频域信号

Figure 6. Ellipsometric signal in the proximity of the non-zero linear work point. (a) Signal in the time domain; (b) corresponding signal in the frequency domain

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图 7 不同光轴方向下304不锈钢的椭偏应力测量结果。（a）光轴平行于x方向；（b）光轴平行于y方向

Figure 7. Ellipsometric stress results of 304 stainless-steel under different optical axis directions. (a) Optical axis parallel to the x-direction; (b) optical axis parallel to the y-direction

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