面向微光学元件表面形貌测量的涡旋相移数字全息技术

薛一梦; 刘丙才; 潘永强; 房鑫萌; 田爱玲; 张瑞轩

doi:10.37188/CO.2023-0180

面向微光学元件表面形貌测量的涡旋相移数字全息技术

doi: 10.37188/CO.2023-0180

薛一梦^{1, 2,},
刘丙才^{1, 2},
潘永强^{1, 2, ,},
房鑫萌^{1, 2},
田爱玲^{1, 2},
张瑞轩^{1, 2}

1.
西安工业大学光电工程学院, 西安 710021
2.
西安工业大学陕西省薄膜技术与光学检测重点实验室, 西安 710021

基金项目: 陕西省科技厅项目（No. 2023KXJ-066）；陕西省教育厅项目（No. 23JY034）

详细信息

作者简介:
薛一梦（2000—），女，陕西西安人，硕士研究生，2022年于西安工业大学获得学士学位。主要研究方向为数字全息测量技术。E-mail：1323964068@qq.com

潘永强（1974—），男，陕西长安人，博士，教授，博士生导师，1998年、2004年于西安工业大学分别获学士、硕士学位，2009年于西安电子科技大学获理学博士学位。主要从事光学薄膜、光学检测技术等方面的研究。E-mail：pyq_867@163.com

中图分类号: O438.1
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出版历程
- 网络出版日期: 2024-02-20

Vortex phase-shifting digital holography for micro-optical element surface topography

XUE Yi meng^{1, 2
,},
LIU Bing cai^{1, 2},
PAN Yong qiang^{1, 2
, ,},
FANG Xin meng^{1, 2},
TIAN Ai ling^{1, 2},
ZHANG Rui xuan^{1, 2}

1.
School of Opto-Electronic Engineering, Xi’an Technological University, Xi’an710021
2.
Shaanxi Province Key Laboratory of Thin Film Technology and Optical Testing, Xi’an Technological University, Xi’an710021

Funds: Supported by Shaanxi Provincial Science and Technology Department Project (No. 2023KXJ-066); Shaanxi Province Education Department Project (No. 23JY034)

More Information

Corresponding author: pyq_867@163.com

摘要

摘要:
非接触、无损害的相移数字全息技术对微光学元件的检测具有独特优势。因传统的相移数字全息技术需要对相移器进行精细控制和繁琐校准，同时其光路易受到机械振动干扰，降低全息再现像的质量。本文借助涡旋光特殊的相位分布，提出了一种基于涡旋相移数字全息的微光学元件表面形貌测量方法。该方法利用螺旋相位板调制涡旋相位，引入高精度相移；基于构建的涡旋相移数字全息显微实验装置，采用干涉极值法确定了相移干涉图之间的真实相移量，并对螺旋相位板的旋转角度与相移量的关系进行标定，实验验证了涡旋相移的可行性；对微透镜阵列进行了重复测量实验，将测试结果与ZYGO白光干涉仪的测试结果进行了比较。结果表明：测量得到单个微透镜的平均纵向矢高为12.897 μm，平均相对误差为0.155%。所提方法可以实现对被测微光学元件表面形貌的高精度测量，具有易于操作、稳定可靠、准确性高等优点。
- 涡旋相移 /
- 数字全息显微 /
- 螺旋相位板 /
- 相位重建
Abstract:
Non-destructive, non-contact phase-shifting digital holography has distinct advantages in identifying micro-optical components. Because traditional phase-shifting digital holography requires fine control and cumbersome calibration of the phase shifter, its optical path is susceptible to mechanical vibration interference, which reduces the quality of the holographically reproduced image. This paper proposes a vortex phase-shifting digital holography for the micro-optical element surface measurement method with the help of the special phase distribution of vortex light. The method utilizes a helical phase plate to modulate the vortex phase and introduce a high-precision phase shift. Based on the constructed vortex phase-shifting digital holographic microscopy experimental setup, the actual phase shifts between phase-shift interferograms were determined using the interferometric polarity method, the relationship between the rotation angle of the helical phase plate and the phase shift was calibrated, and the feasibility of the vortex phase shift was experimentally verified. Repeated measurement experiments were carried out on the micro-lens arrays, and the measurement results were compared with those of the ZYGO white light interferometer. The results indicate that a single micro-lens's average longitudinal sagittal height is 12.897 μm with an average relative error of 0.155%. The proposed method enables highly precise measurement of the surface topography of micro-optical elements. It offers the advantages of easy operation, high stability, and high accuracy.
- vortex phase shift /
- digital holographic microscopy /
- spiral phase plate /
- phase reconstruction

HTML全文

图 1 旋转SPP调制涡旋相位原理图

Figure 1. Schematic diagram of rotating SPP modulated vortex phase

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图 2 涡旋相移数字全息显微成像原理图

Figure 2. Schematic diagram of vortex phase-shifting digital holographic microscopy

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图 3 涡旋相移数字全息显微成像实验装置

Figure 3. Experimental setup for vortex phase-shifting digital holographic microscopy

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图 4 四步相移全息图

Figure 4. Four-step phase-shift holograms

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图 5 微透镜阵列的四幅相移全息图

Figure 5. Four phase-shift holograms of micro-lens arrays

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图 6 微透镜阵列相位处理结果

Figure 6. Results of micro-lens array phase processing

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图 7 单个微透镜截面线选取

Figure 7. I_ndividual micro-lens section line selection

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图 8 微透镜阵列的相移全息图

Figure 8. Phase-shift holograms for micro-lens arrays

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图 9 仿真测量结果

Figure 9. Simulation measurement result

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图 10 微透镜矢高与旋转角度误差之间的关系曲线

Figure 10. Relationship curve between micro-lens vector height and rotational angle error

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表 1 相移全息图的实际相移量和相移误差

Table 1. Actual phase shift and phase shift error in phase shift holograms

No.	Theoretical Phase Shift/rad	Actual Phase Shift/rad	Phase Shift Error/rad
1	0	0	0
2	0.5π	0.4992π	−0.0008π
3	π	0.9963π	−0.0037π
4	1.5π	1.4876π	−0.0024π

下载: 导出CSV

表 2 测量微透镜阵列纵向矢高实验结果

Table 2. Experimental results of measuring the longitudinal vector height of micro-lens arrays

No.	Vertical height of single micro-lens/μm	Absolute error/μm	Relative error/%
1	12.906	0.011	0.085
2	12.917	0.000	0.000
3	12.920	0.003	0.023
4	12.898	0.019	0.147
5	12.921	0.004	0.031
6	12.875	0.042	0.325
7	12.897	0.020	0.155
8	12.860	0.057	0.441
9	12.871	0.046	0.356
10	12.903	0.014	0.108

下载: 导出CSV

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