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面向微光学元件表面形貌测量的涡旋相移数字全息技术

薛一梦 刘丙才 潘永强 房鑫萌 田爱玲 张瑞轩

薛一梦, 刘丙才, 潘永强, 房鑫萌, 田爱玲, 张瑞轩. 面向微光学元件表面形貌测量的涡旋相移数字全息技术[J]. 中国光学(中英文). doi: 10.37188/CO.2023-0180
引用本文: 薛一梦, 刘丙才, 潘永强, 房鑫萌, 田爱玲, 张瑞轩. 面向微光学元件表面形貌测量的涡旋相移数字全息技术[J]. 中国光学(中英文). doi: 10.37188/CO.2023-0180
XUE Yi meng, LIU Bing cai, PAN Yong qiang, FANG Xin meng, TIAN Ai ling, ZHANG Rui xuan. Vortex phase-shifting digital holography for micro-optical element surface topography[J]. Chinese Optics. doi: 10.37188/CO.2023-0180
Citation: XUE Yi meng, LIU Bing cai, PAN Yong qiang, FANG Xin meng, TIAN Ai ling, ZHANG Rui xuan. Vortex phase-shifting digital holography for micro-optical element surface topography[J]. Chinese Optics. doi: 10.37188/CO.2023-0180

面向微光学元件表面形貌测量的涡旋相移数字全息技术

doi: 10.37188/CO.2023-0180
基金项目: 陕西省科技厅项目(No. 2023KXJ-066);陕西省教育厅项目(No. 23JY034)
详细信息
    作者简介:

    薛一梦(2000—),女,陕西西安人,硕士研究生,2022年于西安工业大学获得学士学位。主要研究方向为数字全息测量技术。E-mail:1323964068@qq.com

    潘永强(1974—),男,陕西长安人,博士,教授,博士生导师,1998年、2004年于西安工业大学分别获学士、硕士学位,2009年于西安电子科技大学获理学博士学位。主要从事光学薄膜、光学检测技术等方面的研究。E-mail:pyq_867@163.com

  • 中图分类号: O438.1

Vortex phase-shifting digital holography for micro-optical element surface topography

Funds: Supported by Shaanxi Provincial Science and Technology Department Project (No. 2023KXJ-066); Shaanxi Province Education Department Project (No. 23JY034)
More Information
  • 摘要:

    非接触、无损害的相移数字全息技术对微光学元件的检测具有独特优势。因传统的相移数字全息技术需要对相移器进行精细控制和繁琐校准,同时其光路易受到机械振动干扰,降低全息再现像的质量。本文借助涡旋光特殊的相位分布,提出了一种基于涡旋相移数字全息的微光学元件表面形貌测量方法。该方法利用螺旋相位板调制涡旋相位,引入高精度相移;基于构建的涡旋相移数字全息显微实验装置,采用干涉极值法确定了相移干涉图之间的真实相移量,并对螺旋相位板的旋转角度与相移量的关系进行标定,实验验证了涡旋相移的可行性;对微透镜阵列进行了重复测量实验,将测试结果与ZYGO白光干涉仪的测试结果进行了比较。结果表明:测量得到单个微透镜的平均纵向矢高为12.897 μm,平均相对误差为0.155%。所提方法可以实现对被测微光学元件表面形貌的高精度测量,具有易于操作、稳定可靠、准确性高等优点。

     

  • 图 1  旋转SPP调制涡旋相位原理图

    Figure 1.  Schematic diagram of rotating SPP modulated vortex phase

    图 2  涡旋相移数字全息显微成像原理图

    Figure 2.  Schematic diagram of vortex phase-shifting digital holographic microscopy

    图 3  涡旋相移数字全息显微成像实验装置

    Figure 3.  Experimental setup for vortex phase-shifting digital holographic microscopy

    图 4  四步相移全息图

    Figure 4.  Four-step phase-shift holograms

    图 5  微透镜阵列的四幅相移全息图

    Figure 5.  Four phase-shift holograms of micro-lens arrays

    图 6  微透镜阵列相位处理结果

    Figure 6.  Results of micro-lens array phase processing

    图 7  单个微透镜截面线选取

    Figure 7.  I_ndividual micro-lens section line selection

    图 8  微透镜阵列的相移全息图

    Figure 8.  Phase-shift holograms for micro-lens arrays

    图 9  仿真测量结果

    Figure 9.  Simulation measurement result

    图 10  微透镜矢高与旋转角度误差之间的关系曲线

    Figure 10.  Relationship curve between micro-lens vector height and rotational angle error

    表  1  相移全息图的实际相移量和相移误差

    Table  1.   Actual phase shift and phase shift error in phase shift holograms

    No. Theoretical Phase
    Shift/rad
    Actual Phase
    Shift/rad
    Phase Shift
    Error/rad
    1 0 0 0
    2 0.5π 0.4992π −0.0008π
    3 π 0.9963π −0.0037π
    4 1.5π 1.4876π −0.0024π
    下载: 导出CSV

    表  2  测量微透镜阵列纵向矢高实验结果

    Table  2.   Experimental results of measuring the longitudinal vector height of micro-lens arrays

    No.Vertical height of single
    micro-lens/μm
    Absolute
    error/μm
    Relative
    error/%
    112.9060.0110.085
    212.9170.0000.000
    312.9200.0030.023
    412.8980.0190.147
    512.9210.0040.031
    612.8750.0420.325
    712.8970.0200.155
    812.8600.0570.441
    912.8710.0460.356
    1012.9030.0140.108
    下载: 导出CSV
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  • 网络出版日期:  2024-02-20

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