A study of high-precision spherical wave calibration method for shack-hartmann wavefront sensor
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摘要:
为解决哈特曼-夏克波前传感器传统标定方法存在的测量精度低、稳定性不足等问题，提出了一种基于球面波的哈特曼-夏克波前传感器高精度绝对标定的方法。通过理论推导获取了球面波的高精度标定方法，结合搭建的球面波标定实验装置，对子孔径数为128×128的哈特曼-夏克波前传感器完成高精度标定，该方法计算得到哈特曼-夏克波前传感器结构参数f，w以及L0的精确值；对标定后哈特曼-夏克波前传感器的测量精度进行测试。实验结果表明，经本文方法标定后的哈特曼-夏克波前传感器的波前复原精度达到了PV=1.376×10−2λ，RMS=4×10−3λ（λ=625 nm），重复性精度为PV=3.2×10−3λ，RMS=9.76×10−4λ（λ=625 nm）。该方法可以为大口径的SHWFS完成高精度标定，提升测量精度。
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关键词:
- 哈特曼-夏克波前传感器 /
- 绝对标定 /
- 球面波前
Abstract:To address the issues of inaccurate measurements and unstable calibration processes in conventional Shack-Hartmann wavefront sensors (SHWFS), we propose a high-precision absolute calibration method using spherical waves generated by the sensor. The SHWFS experiences an extremely precise calibration process with 128×128 sub-apertures. This is achieved using a method of spherical wave obtained through theoretical derivation in conjunction with the constructed experimental device for spherical wave calibration. The structural parameters of the SHWFS (
f ,w , andL 0) are calculated precisely. Also, the measurement accuracy of the SHWFS is verified following calibration. The experimental results demonstrate that by using this method to calibrate the Shack-Hartmann wavefront sensor, its wavefront recovery accuracy reaches a PV of 1.376×10−2λ and an RMS of 4×10−3λ (where λ=625 nm), respectively. Additionally, its repeatability accuracy reaches a PV of 3.2×10−3λ and an RMS of 9.76×10−4λ (where λ=625 nm), respectively. These findings suggest that this method is suitable for enhancing the measurement accuracy of high-precision calibration of SHWFS with large aperture. -
图 2 球面波前在SHWFS探测器上形成的光斑图
Figure 2. Spots pattern of a spherical wavefront on the plane of the SHWFS detector
图 3 高精度球面波标定装置原理图
Figure 3. Schematic diagram of the high-precision spherical wavefront calibration device
图 4 高精度球面波标定实物装置
Figure 4. Setup of the high-precision spherical wavefront calibration
图 5 不同曲率半径的球面波前复原误差
Figure 5. Residual errors for spherical waves with different curvature radii
表 1 待标定的SHWFS的物理参数
Table 1. Parameters of the SHWFS to be calibrated
CCD相机 参数 微透镜阵列 参数 生产商 HIKROBOT 子孔径大小 0.1 mm×0.1 mm 型号 MV-CH250-90TM-M58S-NF 使用子孔径数 128×128 像素个数 5120×5120 焦距 2.4 mm 像素尺寸 2.5 um x 2.5 um 通光口径 Φ12.8 mm 
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表 2 待标定的SHWFS的参数测量值
Table 2. Measured values for parameters of the SHWFS to be calibrated.
实验结果
参数f/mm $ \mathrm{w}=\dfrac{\mathrm{P}}{\mathrm{S}} $ L0/mm 测量次数 1 2.402 39.960 1050.00 2 2.402 39.960 1050.00 3 2.402 39.960 1050.00 4 2.403 39.959 1050.00 5 2.402 39.960 1050.00 6 2.402 39.960 1050.00 7 2.403 39.959 1050.00 8 2.402 39.960 1050.00 9 2.401 39.961 1050.00 10 2.402 39.960 1050.00 均值 2.402 39.960 1050.00
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