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膜层对熔石英表面损伤修复点光调制性能调控研究

蒋勇 廖威 王毕艺 赵万利 刘强虎 邱荣 郭德成 周磊 周强 张远恒

蒋勇, 廖威, 王毕艺, 赵万利, 刘强虎, 邱荣, 郭德成, 周磊, 周强, 张远恒. 膜层对熔石英表面损伤修复点光调制性能调控研究[J]. 中国光学. doi: 10.37188/CO.2020-0110
引用本文: 蒋勇, 廖威, 王毕艺, 赵万利, 刘强虎, 邱荣, 郭德成, 周磊, 周强, 张远恒. 膜层对熔石英表面损伤修复点光调制性能调控研究[J]. 中国光学. doi: 10.37188/CO.2020-0110
JIANG Yong, LIAO Wei, WANG Biyi, ZHAO Wanli, LIU Qianghu, QIU Rong, GUO Decheng, ZHOU Lei, ZHOU Qiang, ZHANG Yuanheng. Influence of modulation performance on coating on repaired fused silica[J]. Chinese Optics. doi: 10.37188/CO.2020-0110
Citation: JIANG Yong, LIAO Wei, WANG Biyi, ZHAO Wanli, LIU Qianghu, QIU Rong, GUO Decheng, ZHOU Lei, ZHOU Qiang, ZHANG Yuanheng. Influence of modulation performance on coating on repaired fused silica[J]. Chinese Optics. doi: 10.37188/CO.2020-0110

膜层对熔石英表面损伤修复点光调制性能调控研究

doi: 10.37188/CO.2020-0110
基金项目: 国家自然科学科学基金资助项目(No. 11972313,61775235,61705205,61505170)、国防基础科研计划项目(No. JCKY2020210C005)、四川省大学生创新创业训练资助项目(No. S202010619071、S201910619039),西南科技大学龙山人才计划资助项目(No. 18lzx516)
详细信息
    作者简介:

    蒋勇:蒋 勇(1982—),男,四川仁寿人,博士,副教授,2012年于电子科技大学获得博士学位,主要从事强激光与物质相互作用的理论与实验方面的研究工作。E-mail:y_jiang@swust.edu.cn

  • 中图分类号: O439

Influence of modulation performance on coating on repaired fused silica

Funds: Supported by National Natural Science Foundation of China (No. 11972313, 61775235, 61705205, 61505170), National defense basic scientific research project (No. JCKY2020210C005), Sichuan University Students' innovation and entrepreneurship training program (No. s202010619071, s201910619039) and Longshan talent program of Southwest University of science and Technology (No. 18lzx516)
More Information
  • 摘要: 针对CO2激光修复熔石英表面损伤点后得到的修复点(简称损伤修复点,下同)产生的光调制问题,重点研究损伤修复点在镀增透膜前后的形貌及光调制的变化规律,探讨修复点深度、宽度等形貌因素对SiO2胶体在修复点坑内沉积的影响,以及对光调制效应的影响。研究结果表明:胶体材料在损伤修复点坑内具有明显的富集效应,可有效改善损伤修复点的形貌尺寸,尤其是对深度的影响尤为明显。这虽然会导致损伤修复点在镀膜后最大光调制位置的增大,但其导致的最大光调制却远小于相应未镀膜损伤修复点导致的调制度。研究结果对进一步优化对熔石英表面损伤点的修复工艺及光调制度控制提供参考。
  • 图  1  测量光路示意图

    Figure  1.  Diagram of the test system

    图  2  未镀膜损伤修复点(a)及镀膜修复点(b)的光学显微形貌图

    Figure  2.  Morphology of un-coated (a) and coated (b) repair site

    图  3  损伤修复点镀膜前后的轮廓图。

    Figure  3.  Profile of repaired site before and after coating

    图  4  未镀膜损伤修复点在不同位置处的衍射图像

    Figure  4.  Diffraction images of the un-coatied repaired site at different locations

    图  5  镀膜修复点在不同位置处的衍射图像

    Figure  5.  Diffraction images of the coating repaired site at different locations

    图  6  损伤修复点镀膜前(矩形图标)后(圆形图标)调制度随距离的演化曲线

    Figure  6.  The evolution curve of modulation over distance before (rectangle) and after (circle) coating of repaired site

    图  7  不同形貌损伤修复点光调制随距离的演化曲线

    Figure  7.  The relationships between the modulation of the repaired site with different morphologies and distances

    图  8  损伤修复点镀膜前后坑深度的变化规律

    Figure  8.  Change behavior of crater depth before and after coating of the repair site

    图  9  镀膜前后损伤修复点最大光调制的变化规律

    Figure  9.  Change behavior of the maximum light modulation of the repaired site before and after coating

    表  1  损伤修复点镀膜前后参数与最大光调制度

    Table  1.   Parameters of the repaired site before and after coating vs. the maximum modulation

    深度/μm宽度/mm最大调制度
    未镀膜修复点图35.150.866.2
    图7(a1)5.840.96.7
    图7(b1)8.910.78.9
    镀膜修复点图32.970.84.8
    图7(a1)4.050.85.5
    图7(b1)6.550.77.1
    下载: 导出CSV
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