放电脉冲重频准分子激光器在不同应用领域的发展现状

LOSEV V F; PANCHENKO Yu N; DUDAREV V V; IVANOV N G; KONOVALOV I N; PAVLINSKY A V; PUCHIKIN A V

放电脉冲重频准分子激光器在不同应用领域的发展现状

俄罗斯科学院西伯利亚分院强电流研究所, 托木斯克 634055

基金项目:

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

详细信息

中图分类号: TN248.2
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出版历程
- 收稿日期: 2010-08-11
- 修回日期: 2010-10-13
- 刊出日期: 2011-02-25

Development of discharge pulse repetition rate excimer lasers for different applications

Institute of High Current Electronics of Siberian Branch of Russian Academy of Sciences,Tomsk 634055,Russia

Funds:

Supported by Russian Foundation for Basic Research Project(No.10-08-90002a)

摘要

摘要: 研究了脉冲宽度为25~40 ns的放电脉冲XeCl准分子激光器的工作参数。结果显示,激光器产生的脉冲能量为0.2~0.7 J,重复频率为100 Hz,表明在泵浦功率为2.8~3.3 MW/cm3时,激光器实现了2.6％的激光效率和3.8％的本征效率。
- 准分子激光器 /
- 泵浦功率 /
- 体放电 /
- 预电离 /
- 激光效率 /
- 脉冲持续时间 /
- 气体混合物
Abstract: The working parameters of the discharge pulse-periodic XeCl lasers with pulse duration of 25-40 ns are researched. Results demonstrate that the lasers generate the pulses of radiation with energies of 0.2-0.7 J and operate with a repetition rate up to 100 Hz. It is shown that the total laser efficiency of 2.6% and the intrinsic efficiency of 3.8% are realized with the pumping power of 2.8-3.3 MW/cm.
- excimer laser /
- pumping power /
- bulk discharge /
- preionization /
- laser efficiency /
- pulse duration /
- gas mixture

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参考文献(1)

[1] BORISOV V M,BRAGIN I E,VINOKHODOV A Yu,et al.. Pumping rate of electric-discharge excimer lasers[J]. Quantum Electron.,1995,25(6):507. [2] LACOUR B,BRUNET H,BESAUCELE H,et al.. 500 watts industrial excimer laser at high repetition rate[J]. SPIE,1994,2206:41. [3] RIVA R,LEGENTIL M,PASQUIERS S,et al.. Experimental and theoretical investigations of a XeCl phototriggered laser[J]. Phys. D.:Appl. Phys.,1995,28:856. [4] MAKAROV M,BONNET J,PIGACH D. High efficiency discharge-pumped XeCl laser[J]. Appl. Phys.B,1998,66:417. [5] LO D,XIE J. A megawatt excimer laser of small discharge volume(3.8 cm³)[J]. Opt. and Quantum Electronics,1989,21:147. [6] MIYAZAKI K,TODA Y,HASAMA T,et al.. Efficient and compact discharge XeCl laser with automatic UV preionization[J] . Rev. Sci. Instrum.,1985,56:201. [7] PANCHENKO Yu N,IVANOV N G,LOSEV V F. Electric-discharge XeCl laser emitting 10-J, 300-ns pulses [J]. Rus. Quantum Electron.,2005,35:618. [8] BYCHKOV Yu I,LOSEV V F,PANCHENKO Yu N,et al.. Research of short pulse discharge XeCl laser[J]. SPIE,2005,5777:558. [9] BYCHKOV Yu I,LOSEV V F,PANCHENKO Yu N,et al.. Efficiency of discharge XeCl laser with 30 ns pulse duration of radiation[J]. SPIE,2006:60530F. [10] BYCHKOV Yu I,BALBONENKO E F,IVANOV N G,et al.. Discharge pulse-repetition XeCl laser with high efficiency and intensity of radiation[J]. SPIE,2007,6611:66110E. [11] PANCHENKO Yu N,LOSEV V F,DUDAREV V V. Generation of diffraction-limited nanosecond and subnanosecond pulses in a XeCl laser[J]. Rus. Quantum Electron.,2008,38:369. [12] PANCHENKO Yu N,LOSEV V F,IVANOV N G,et al.. Effective pulse-periodic excimer lasers[J]. Atmospheric and Oceanic Opt.,2008,21:674. [13] DUDAREV V V,KOTOV Yu A,LOSEV V F,et al.. Research of production conditions of CeGdO nanopowder with help of excimer laser radiation[J]. Proceedings TPU,2008,2:140.

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放电脉冲重频准分子激光器在不同应用领域的发展现状

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Development of discharge pulse repetition rate excimer lasers for different applications

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放电脉冲重频准分子激光器在不同应用领域的发展现状

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Development of discharge pulse repetition rate excimer lasers for different applications

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出版历程

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