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[an error occurred while processing this directive] 中国光学 2010, 15(3) 279-284  ISSN: 2095-1531 CN: 1400/O4

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光学测试
丝杠精度双频激光干涉测量中的 阿贝误差实时补偿
齐向东1;滕丽华1,2;于海利1,2
1. 中国科学院 长春光学精密机械与物理研究所,吉林 长春 130033;2. 中国科学院 研究生院,北京 100039
摘要

提出一种利用双频激光干涉仪检测光栅刻划机分度丝杠的新型光路结构,推导出用于阿贝误差补偿的快速修正计算式,实现了丝杠测试过程中阿贝误差的实时修正,通过修正使不满足阿贝原则的测量系统获得了较高的测量精度。另外该方法还通过调整参考镜角锥棱镜消除了测量过程中丝杠轴向窜动引起的测量误差。实验结果表明,采用提出的方法在300 mm的丝杠行程内修正的最大阿贝误差为1.39 μm,补偿后最大残差仅为0.48 μm,有效地提高了丝杠测量精度。

关键词 光栅刻划机   丝杠   双频激光干涉仪   阿贝误差  
Real-time compensation of Abbe error in measuring lead screw accuracy by dual-frequency laser interferometer
QI Xiang-dong1;TENG Li-hua1,2;YU Hai-li1,2
1. Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China;2. Graduate University of Chinese Academy of Sciences,Beijing 100039,China
Abstract:

A new optical structure in a dual-frequency laser interferometer for measuring lead screws in diffraction grating ruling engines is proposed, and a formula which can quickly correct the Abbe error is deduced in this paper. In the process of testing lead screws, because the Abbe error in the measured data can be compensated in real time, the measurement system which doesn't meet Abbe principle can achieve high measurment accuracy. In addition, by adjusting the reference angle of the conical prisms, this method can also eliminate the measurement error induced by the axial movement of a lead screw in measuring process. The experimental result shows that the maximum residual error is only 0.48 μm within a 300 mm stroke after the maximum Abbe error of 1.39 μm is corrected. In conclusion, this method effectively improves the measurement accuracy of lead screws.

Keywords: diffraction grating ruling engine   lead screw   dual-frequency laser interferometer   Abbe error  
收稿日期 2010-01-16 修回日期 1900-01-01 网络版发布日期  
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